Chifukwa Chake Graphite Yoyera Kwambiri Ndi Yofunika Kwambiri Pa Kulamulira Ziphuphu za SiC Epitaxy

Ubwino wa wafer wa silicon carbide (SiC) wopangidwa umakhudzidwa ndi kusintha kochepa komwe kumachitika m'malo okulira. Malo omwe ambiri saganizira ndi graphite yomwe ili mkati mwa reactor. Imayesa kutentha kwambiri komwe kumapezeka mkati mwa reactor pamene ikuchirikiza ndikuyika wafer panthawi ya epitaxy. Ngati graphite ndi yodetsedwa kapena yokonzedwa molakwika, zidutswa zazing'ono za zinthu kapena zomwe sizikufunidwa zitha kuyikidwa panthawi yonse yokulira. Mavuto ang'onoang'ono pamwamba pa graphite amatha kufalikira kukhala zolakwika zazikulu za wafer, zomwe zimapangitsa kuti opanga ma chip azigwira ntchito kwambiri komanso azipeza phindu lochepa. Chifukwa chake mkhalidwe ndi ukhondo wa Mphuno ya graphite ndi nkhani yofunika kwambiri kuposa momwe ambiri angaganizire.

Kodi Kuyera kwa Graphite Kumakhudza Bwanji Mavuto a Tinthu mu Epitaxy Chambers?

Tinthu tating'onoting'ono ndi vuto lalikulu la wafer m'zipinda za SiC epitaxy, ndipo nthawi zambiri timagwiritsa ntchito graphite. Zigawo za graphite zimakhala m'dera lotentha la SiC reactor, zomwe zimanyamula wafer ndikukhudza mawonekedwe a kutentha. Pogwiritsa ntchito graphite yoyera pang'ono, zonyansa zochepa, monga zodetsa zachitsulo, phulusa, kapena zotsalira zotsalira, zimatha kutuluka mpweya kuchokera ku graphite pang'onopang'ono pakapita nthawi kutentha kwakukulu kukukula. Zonyansa zomwe zimachotsedwa nthawi zambiri sizimawonekera m'chipindamo, koma pamapeto pake zimagwera pamwamba pa wafer, kapena zimakhala gawo la gawo la mpweya. Mwachitsanzo, mu ntchito ina, katswiri adasankha graphite yotsika mtengo kuti asunge ndalama. Ngakhale kuti panalibe mavuto omwe adawonekera panthawi yochepa, pambuyo pa maulendo angapo a Sic epitaxy , mabowo osasunthika ndi mawanga ozungulira anapezeka pamwamba pa wafer. Gwero la zolakwika zotere linapezeka kuchokera ku tinthu tating'onoting'ono tomwe timatuluka kuchokera ku chogwirira cha graphite kapena susceptor. Tinthu tating'onoting'ono timalowa m'chipinda chokulirapo ndikuchita ngati mbewu mwanjira yosafunikira. Kuchulukana kosagwirizana kwa gawo la graphite kungathandizenso kusweka kwa tinthu tating'onoting'ono pamwamba pa gawolo likatenthedwa, zomwe zimapangitsa kuti tinthu tating'onoting'ono tituluke m'chipindamo pakapita nthawi, ngakhale kuti gawolo lingawoneke loyera. Chifukwa chake, kuyang'anira komwe kwachokera graphite ndi mbiri yake ndi ntchito yachizolowezi muzinthu zopangira kuti tipewe zolakwika zokhudzana ndi tinthu tating'onoting'ono. Grafiti yoyera kwambiri yokhala ndi phulusa lolamulidwa nthawi zambiri imakhala yofunikira, makamaka popanga nthawi yayitali. Kuchuluka kwa kutentha kwa zigawo kumawunikiranso chifukwa zipangizo zimataya tinthu tating'onoting'ono ngakhale zitakonzedwa bwino koyambirira. Komanso, njira yosamalira zigawo za graphite imakhudza zolakwika. Mwachitsanzo, njira zotsukira mwamphamvu zingawononge pamwamba pa graphite ndikupangitsa kuti pakhale ming'alu yaying'ono. Njira yabwino kwambiri ndi njira yoyeretsa yofatsa, yolamulidwa komanso yopanda kuyanjana kwenikweni ndi zigawo za graphite. Pazifukwa zachuma, kusintha ziwalozo mwachangu kuposa momwe zimayembekezeredwa kungakhale bwino kuposa kuthana ndi kutayika kwa zokolola pambuyo pake. Mwachidule, kuwongolera kupanga tinthu tating'onoting'ono mu njira ya SiC epitaxy kumazungulira pazinthu zazing'ono paubwino wa zinthu ndi machitidwe ogwirira ntchito. Nkhani ya ubwino wa graphite ndiyo maziko a nkhaniyi.

Zofunikira pa Zida Zapamwamba za SiC Epitaxial ndi Susceptors

Pa SiC epitaxy, zigawo zomwe zili mu reactor sizimangogwira wafer. Ma susceptors, ma graphite carriers ndi zigawo za hotzone mu reactor zimakhudza kukula kwa kristalo. Ichi ndichifukwa chake zipangizozi zimakhala zovuta kwambiri ndipo cholakwika chaching'ono chidzawonekera ngati cholakwika pa wafer. Kukhazikika kwa kutentha kwambiri ndikofunikira kwambiri. Zigawozi zimatenthedwa kutentha kwambiri kwa nthawi yayitali (nthawi zina kutentha/kuzizira mobwerezabwereza). Zinthu zomwe sizingasunge bata pa kutentha kumeneku zimasokonekera ndipo pamapeto pake zimatha kusweka. Kusintha pang'ono kwa geometry kumatha kusintha kwambiri kayendedwe ka mpweya ndi kugawa kutentha komwe kumabweretsa kukula kwa kristalo kosagwirizana pamwamba pa wafer. Kuyera ndi chinthu china chofunikira. Njira zapamwamba za SiC zimafuna kukhala ndi chitsulo chochepa kwambiri komanso phulusa lochepa kwambiri m'zigawo zochokera ku graphite. Pakugwira ntchito, zitsulo zotsatizana zimatuluka pang'onopang'ono m'zigawozo, zodetsa zimatha kufalikira m'chipindamo ndikupangitsa kuti pakhale kuipitsidwa kwa tinthu tating'ono kapena zolakwika za kristalo zakomweko. Muzinthu zina, cholakwika cha stacking mwachisawawa chapezeka kuti chachokera ku gulu limodzi la susceptor yoipitsidwa. Kapangidwe ka pamwamba ndi kofunikira kwambiri. Malo osalala komanso ofanana amathandiza kuchepetsa kutaya kwa tinthu tating'onoting'ono panthawi yotenthetsera/kuzizira. Malo osafanana, kapena ma pores omwe ali pamwamba pake, amawonongeka nthawi zonse panthawi yogwira ntchito ndipo motero amapanga gwero lokhazikika la tinthu tating'onoting'ono m'chipindamo. Ubwino wa chophimbacho ndi chinthu china chofunikira kwambiri. Ma susceptors ambiri apamwamba amagwiritsa ntchito chophimba cha SiC ngati gawo loteteza. Chophimbacho chiyenera kumamatira bwino ku zinthu zoyambira ndipo chiyenera kupirira kugwira ntchito kwa nthawi yayitali. Kulumikizana kosayenera ndi kuchotsedwa kwa lamination kudzawonetsa mwachindunji graphite yoyambira ku malo ovuta. Nthawi zambiri timawona izi mu ntchito zenizeni: mwachitsanzo, nsalu yopangidwa ndi wafer yomwe imagwira ntchito nthawi yayitali idzawona kuti chilema chikukwera pang'onopang'ono pambuyo pa ma cycle mazana ambiri. Kuyang'ana susceptor kudzawonetsa kuwonongeka pang'ono kwa chophimbacho ndi kuwonongeka kwa m'mphepete. Kusintha kapena kusintha gawolo kudzabwezera chilemacho pamlingo wovomerezeka. Kusankha zipangizo zoyenera sikungokhudza kugwira ntchito koyambirira kwa zigawozo, komanso kukhazikika kwa zinthuzo m'ma cycle obwerezabwereza.

Zotsatira za Kapangidwe ka Tirigu pa Kukhazikika kwa Kutentha mu Machitidwe a AIXTRON G10

Kapangidwe ka tinthu ta graphite mkati mwa SiC yotentha kwambiri Epitaxy kukula Dongosolo, monga AIXTRON G10, limakhudza kwambiri kukhazikika kwa kutentha. Izi zikugwirizana ndi kusintha kwa mawonekedwe, kusunga mawonekedwe, komanso kuyankha kwa kutentha. Graphite si chinthu cholimba cha monolithic. Chimakhala ndi ma crystallites kapena tinthu tambirimbiri. Ma crystallites amodzi amatha kukhala ndi mawonekedwe osiyanasiyana. Pakakhala kusalamulira bwino kukula kwa tirigu mkati mwa gawo la graphite, kufalikira kwa kutentha kosagwirizana kumachitika. Madera a gawoli amatenthedwa ndikuzizira pamlingo wosiyana. Izi zimapangitsa kupsinjika kwamkati pamlingo wochepa. Pang'onopang'ono pakapita nthawi kupsinjika kwamkati kumeneku kumayambitsa kupindika kapena kusokonekera m'zigawo monga susceptor kapena chonyamulira wafer. Njirayi imadziwika mosavuta panthawi yopanga. Nthawi zambiri imawonekera pamene mzere wa wafer ukugwira ntchito kutentha kwambiri. Ubwino wa wafer umayamba kuyenda pambuyo pa mazana ambiri a kutentha. Kusintha kwa makulidwe kumawonjezeka, ndipo zolakwika za m'mphepete zimayamba kuonekera pafupipafupi. Zigawozi zikawunikidwa nthawi zambiri zimakhala ndi zizindikiro za kupindika kapena kutopa kwa zinthu. Kapangidwe ka tirigu kakang'ono kokhala ndi kufalikira kwa crystallite kolamulidwa kadzakhala ndi kukhazikika kwa kutentha bwino kuposa tirigu wosalala kapena kapangidwe kosasinthika. Izi zipangitsa kuti kutentha kusamuke bwino komanso kuchepetsa malo opsinjika. Ndi kapangidwe kabwino ka tirigu, ziwalozo sizingagwedezeke ngakhale pa nthawi zambiri zotenthetsera. Kapangidwe kolimba kapena kapangidwe ka tirigu kosagawanika bwino kamabweretsa malo ofooka mkati mwa gawolo, zomwe zimapangitsa kuti tinthu tating'onoting'ono tituluke m'chipindamo. Nkhani ina yofunika kuganizira ndi kukana kutentha. Pali malo omwe gawolo limakumana ndi kusintha kwakukulu kwa kutentha monga kulowetsa mu reactor kapena kuchotsedwa. Ngati pali malire ofooka pakati pa tirigu, ndiye kuti ming'alu yaying'ono ingapangidwe m'mbali mwa tirigu. Ngakhale izi sizimapangitsa kuti mbali zina zilephereke, zimalola kuti zofookazi zipangidwe muzinthuzo, zomwe zimapangitsa kuti zikhale zovuta kudalirika mtsogolo. Zinthu zambiri zokongola zimatsata nthawi yonse ya gawolo poganizira maola omwe agwiritsidwa ntchito, komanso kuchuluka kwa nthawi zotenthetsera komanso chithandizo chonse cha kutentha. Zigawo zomwe zili ndi kapangidwe ka tirigu kokonzedwa bwino zimakhala ndi moyo wautali, zotsatira zake zimakhala zofanana pakapita nthawi.

Kuchepetsa Kuipitsidwa kwa Zitsulo mu Zigawo za Graphite Yoyera Kwambiri

Limodzi mwa mavuto "osaoneka" koma ofunikira kwambiri m'gawo lililonse la graphite, kuphatikizapo njira ya SiC epitaxy, ndi kuipitsidwa kwa chitsulo. Ngakhale zizindikiro zazing'ono za zitsulo m'gawo la graphite zimatha kulowa mu ndondomekoyi ndikukhala gwero lovuta kutsata zolakwika mu SiC epitaxy reactor monga AIXTRON G10. Zitsulo zotere nthawi zambiri zimachokera ku zipangizo zopangira kapena njira zosiyanasiyana zopangira zomwe zimagwiritsidwa ntchito popanga gawo la graphite. Zinthu monga Iron, Nickel, Calcium ndi Sodium ndizofala ndipo zimakhalabe mu graphite yambiri kutentha kwa chipinda, komabe, kutentha kwa njira yogwiritsidwa ntchito mu SiC epitaxy, zinthuzi zimatha kuyenda. Zitsulo izi zimatha kuchotsedwa mpweya kapena kusamukira pamwamba panthawi yotenthetsa/kuzizira mobwerezabwereza m'dera lotentha, lomwe ndi susceptor kapena chonyamulira cha wafer chokha. Nkhani yanthawi zonse ingakhale motere: chinthu chopangidwa bwino chimayambitsa gulu lopanga pogwiritsa ntchito zigawo zatsopano za graphite. Ma wafer ochepa oyamba ndi abwino ndipo sawonetsa zolakwika, koma pakapita nthawi inayake, zolakwika zazing'ono zimayamba kuwonekera. Kawirikawiri amakhala mabowo ang'onoang'ono, zolakwika mwachisawawa, kapena zochitika zosamveka bwino za tinthu. N'zosavuta kukayikira molakwika kuti mpweya ukuyenda molakwika kapena kuipitsidwa kumachitika panthawi yoyeretsa chipinda. Koma kusanthula mwatsatanetsatane nthawi zambiri kumabweretsa kutulutsidwa pang'onopang'ono kwa zitsulo zochepa kuchokera ku zigawo za graphite. Kulamulira kuyera kwa graphite ndi chimodzi mwa zinthu zofunika kwambiri. Pa zigawo zofunika kwambiri, graphite yoyeretsedwa kutentha kwambiri yokhala ndi phulusa lochepa nthawi zonse imakondedwa. Gawo loyeretsali limachotsa zotsalira zambiri zachitsulo. Graphite yotereyi imatha kusunga zinthuzo kwa nthawi yayitali ngakhale pansi pa kutentha/kuzizira mobwerezabwereza. Kuyang'ananso kwa zigawo za graphite ndikofunikira kwambiri pazinthu zina. Kuyesa magulu a graphite ndi njira monga ICP-OES kapena XRF kungalepheretse kugwiritsa ntchito zigawo zoipitsidwa. Zingalepheretsenso kusakaniza zigawo kuchokera kuzinthu zosiyanasiyana mkati mwa kayendedwe ka njira yomweyo. Zophimba monga SiC kapena TaC zimathandizanso kuthetsa vutoli pochita ngati chotchinga pakati pa gawo la graphite ndi malo opangira. Bola ngati chophimbacho chaikidwa bwino ndikulumikizidwa ku gawo la graphite lomwe lili pansi pake, zimachepetsa kuyanjana kwa gawo la graphite ndi malo opangira zinthu. Chomaliza koma chofunikira kwambiri ndi kusamalira ndi kusungira magawo a graphite. Zigawo za graphite zitha kuipitsidwa pogwira ntchito ndi magolovesi, zida kapena posungidwa pashelefu yodetsedwa. Kuipitsidwa kumeneku kumatha kulowa mu uvuni panthawi yotenthetsera. Kuti muchepetse kuipitsidwa kwa zitsulo kwa zigawo za graphite, ndi ntchito yaying'ono yambiri. Zipangizo zoyera kwambiri pamodzi ndi machitidwe abwino ogwirira ntchito komanso kuwongolera bwino njira zogwirira ntchito ndikofunikira.

Chifukwa Chiyani Veeco EPIK Systems Imafuna Zipangizo za Graphite Zochepa Kwambiri?

Zigawo za graphite mkati mwa nsanja ya Veeco EPIK Systems zimakumana ndi chimodzi mwa zinthu zovuta kwambiri pakupanga ma semiconductor. Zinthuzi zimakhala ndi kutentha kwambiri, mpweya woopsa komanso nthawi yayitali yogwirira ntchito. Chifukwa chake, graphite yotsika kwambiri ndiyofunika kwambiri kuti SiC epitaxy isunge umphumphu ndi ukhondo. Ma porosity amatanthauza ma pores ang'onoang'ono amkati omwe amapezeka mkati mwa thupi la graphite. Ngakhale kuti pamwamba pake pali posalala bwino, ma pores amkati amatha kukhala ndi mpweya wotsekereza, zotsalira ndi mankhwala oyeretsera. Ma porosity ambiri amatanthauza kuchuluka kwamkati kotsekereza, komwe pambuyo pa kutentha kwambiri, zinthu zimatha kuchotsedwa pang'onopang'ono. Kuchotsa mpweya kumeneku sikumakhala kolunjika nthawi zonse ndipo kungayambitse kuphulika, zomwe zimapangitsa kuti njirayi ikhale yovuta kuwongolera. Mu SiC epitaxy, izi zimakhala zoopsa kwambiri. Mpweya ukatulutsidwa kuchokera ku thupi la graphite ukhoza kuphatikizidwa mu kayendedwe ka mpweya mkati mwa chipinda cha epitaxy, zomwe zimapangitsa kuti tinthu tosafunikira timeneti tipezeke. Tinthu tating'onoting'ono timalowa pamwamba pa wafer, zomwe zimakhudza kukula kwa kristalo ndipo zingayambitse zolakwika zosayembekezereka monga maenje osasunthika, kugwedezeka pamwamba kapena kusinthasintha kwa makulidwe a wafer. Chochitika chachizolowezi chomwe chimachitika ndi m'malo opangira zinthu pomwe nsalu yoyera imalandira zigawo zatsopano za graphite za dongosolo la EPIK. Zotsatira zoyambirira zitha kukhala zovomerezeka, komabe pamene kutentha kumabwerezabwereza, kuchuluka kwa zolakwika kumatha kukwera ndipo kuyang'ana kwa njira yopangira zinthu kuphatikizapo mizere ya gasi, ma valve ndi magawo oyeretsera sikungawonetse chilichonse chodziwikiratu. Nthawi zambiri zimawululidwa kuti choyambitsa ndi graphite yotsika kwambiri mkati mwa malo otentha kwambiri. Kusankha graphite yotsika kwambiri kumachepetsa chiopsezochi pochepetsa kuchuluka kwa mkati momwe mitundu yogwidwa ingabisike, kuchepetsa mwayi wotulutsa mpweya mwadzidzidzi ikatenthedwa. Zimagwirizanitsidwanso ndi umphumphu wabwino wa makina. Kapangidwe kolimba ka graphite yotsika kwambiri nthawi zambiri imapereka kukana kwakukulu ku ming'alu pamene graphite ikupitilira kutentha mobwerezabwereza. Kuphatikiza apo, malo otsika kwambiri a porosity amalimbikitsa umphumphu wowonjezera. SiC kapena zinthu zina zotsutsana zikapakidwa pamwamba pa graphite izi, zimamatira bwino pamalo opanda porosity. Izi mwina zimachitika chifukwa cha kugwirizana kwakukulu kwa mgwirizano pakati pa zinthu zophimbidwa ndi graphite, zomwe zimapangitsa kuti zophimbidwazo zikhale zolimba komanso zokhalitsa komanso kuthekera kwawo kochotsa kapena kusweka. Pomaliza, kusankha graphite yotsika kwambiri popanga zinthu tsiku ndi tsiku, ngakhale kuti ndi chinthu chamtengo wapatali, kumapereka phindu lalikulu pakukwaniritsa zotsatira za wafer yokhazikika, yoyera, komanso yodziwikiratu mkati mwa njira zapamwamba za SiC epitaxy.