Momwe Mungasankhire Mphete Yoyang'ana Yoyenera Pakujambula Plasma ya Semiconductor？

Chiyambi: Chifukwa Chake Mphete Zoyang'ana pa Semiconductor Ndi Zofunika Pakupanga Zapamwamba

Mu kupanga ma semiconductor amakono, kupeza mphamvu zambiri za wafer komanso kugwira ntchito bwino kwa chipangizochi sikudalira kokha pa luso lapamwamba la lithography ndi deposition komanso kuwongolera bwino momwe plasma imagwirira ntchito. Pakati pa zinthu zambiri zomwe zili mkati mwa chipinda chopangira plasma, Semiconductor Focus Ring imagwira ntchito yofunika kwambiri koma nthawi zambiri imachepetsedwa.

Mphete Yoyang'ana ndi chinthu chopangidwa mwaluso chomwe chimayikidwa m'mphepete mwa wafer pa electrostatic chuck (ESC). Ntchito yake yayikulu ndikulamulira kufalikira kwa plasma, kuwongolera minda yamagetsi yam'mphepete, ndikusunga flux ya ma ion yofanana pamwamba pa wafer panthawi yocheka plasma.

Pamene zipangizo za semiconductor zikupitilira kukula kupita ku ma node apamwamba a logic, kukumbukira kwakukulu, ndi zida zamagetsi za wide-bandgap, zofunikira pakujambula plasma zakhala zovuta kwambiri. Kusintha kwa wafer m'mphepete kumatha kukhudza mwachindunji kuwongolera kwa critical dimension (CD), kufanana kwa kujambula, kupanga zolakwika, ndi phindu lonse la kupanga.

Chifukwa chake, kusankha zinthu zoyenera za Focus Ring kwakhala chisankho chofunikira kwambiri chaukadaulo kwa opanga zida za semiconductor ndi ma wafer fabs.-kuphatikizapo silicon, quartz, silicon carbide (SiC), alumina, ndi yttria ceramics-amapereka ubwino wosiyanasiyana kutengera kapangidwe ka plasma, kutentha kwa njira, zomwe zimafunika pa moyo wonse, komanso miyezo yowongolera kuipitsidwa.

Kodi Mphete Yoyang'ana Semiconductor ndi Chiyani Ndipo Imagwira Ntchito Bwanji?

Mphete Yoyang'ana pa Semiconductor ndi gawo lozungulira lolamulira plasma lomwe limagwiritsidwa ntchito makamaka mu zida zouma, kuphatikiza plasma yolumikizidwa bwino (CCP) ndi makina olumikizidwa bwino a plasma (ICP).

Pakujambula plasma, pakati pa wafer ndi m'mphepete zimakumana ndi malo osiyanasiyana amagetsi chifukwa wafer mwachibadwa sapitirira malire ake enieni. Popanda kulipira, kuchuluka kwa plasma, mphamvu ya ion, ndi kufalikira kwa magetsi pafupi ndi m'mphepete mwa wafer zimatha kukhala zosakhazikika, zomwe zimapangitsa kuti m'mphepete mwake mukhale ndi zotsatirapo monga:

l Mlingo wosagwirizana wa etch

l Kusiyana kwakukulu kwa miyeso

l Kudula m'mphepete

l Kusokoneza mbiri

l Kuchuluka kwa zokolola za wafer

Mphete Yoyang'ana imapanga malo olamulidwa a plasma kuzungulira wozungulira wafer. Mwa kupereka mkhalidwe wofanana wamagetsi ndi wakuthupi, zimathandiza kusunga machitidwe ofanana a plasma kuyambira pakati mpaka m'mphepete mwa wofer.

Mu kupanga zinthu zapamwamba za semiconductor, Focus Ring imagwira ntchito limodzi ndi zigawo zina zofunika kwambiri za chipinda, kuphatikizapo electrostatic chuck (ESC), showerhead, chamber liner, ndi upper electrode, kuti ikwaniritse mikhalidwe yokhazikika yogwiritsira ntchito plasma.

Mphete Yoyang'ana ya Common Semiconductors

Kugwira ntchito kwa Focus Ring kumatsimikiziridwa kwambiri ndi mawonekedwe ake. Opanga ma semiconductor amasankha zinthu zosiyanasiyana kutengera kapangidwe ka plasma, zofunikira pa ntchito, ndi nthawi yomwe zinthuzo zimayembekezeredwa.

1. Mphete Yoyang'ana pa Silicon

Silicon ndi chimodzi mwa zipangizo zomwe zimagwiritsidwa ntchito kwambiri popanga ma semiconductor Focus Rings, makamaka pokonza ma silicon wafer.

Popeza silicon ili ndi makhalidwe ofanana ndi a silicon wafer yomwe ikukonzedwa, Silicon Focus Ring ingapereke mawonekedwe owoneka bwino komanso mawonekedwe abwino kwambiri a m'mphepete.

Ntchito zambiri zimaphatikizapo:

l Kudula kwa silicon

l Kudula kwa ma ion ozama kwambiri (DRIE)

l Kupanga zipangizo zamakono

l Kupanga zokumbukira

Ubwino waukulu wa silicon Focus Rings ndikugwirizana ndi njira. Popeza wafer ndi Focus Ring zimagwirira ntchito mofanana pansi pa plasma, zotsatira zake zimatha kuchepetsedwa.

Komabe, silicon ili ndi kukana kochepa kwa plasma poyerekeza ndi zipangizo zamakono za ceramic, zomwe zimapangitsa kuti ntchito yake ikhale yochepa m'malo ovuta a plasma.

2. Mphete Yoyang'ana ya Silicon Carbide (SiC)

Mphete ya SiC Focus yakhala imodzi mwa zipangizo zofunika kwambiri pa ntchito zapamwamba zolembera plasma.

Silicon carbide ili ndi zinthu zabwino kwambiri, kuphatikizapo:

l Kukana dzimbiri kwa plasma

l High matenthedwe mafuta

l Kupambana kwamakina mphamvu

l Kupanga tinthu tating'onoting'ono kochepa

l Kukhazikika kwapamwamba kwambiri

Zingwe Zoyang'ana za SiC zimagwiritsidwa ntchito kwambiri mu:

l Kudula kwa Dielectric

l Kudula kwa Oxide

l Kukonza semiconductor ya silicon carbide

l Kupanga zipangizo za GaN

l Kugwiritsa ntchito plasma yochuluka kwambiri

Poyerekeza ndi zinthu zachikhalidwe za silicon kapena quartz, SiC imapereka moyo wautali kwambiri komanso kukhazikika bwino pansi pa plasma yamphamvu kwambiri.

Pakupanga zinthu zamakono komanso zokumbukira, ma CVD SiC Focus Rings opangidwa ndi ukhondo wapamwamba akugwiritsidwa ntchito kwambiri chifukwa cha kuchuluka kwawo, kuyera kwawo, komanso kukana kwawo plasma yochokera ku fluorine.

3. Mphete Yoyang'ana ya Quartz

Quartz yakhala ikugwiritsidwa ntchito m'mafakitale ambiri opangira plasma chifukwa cha kuyera kwake kwabwino komanso mphamvu zake zamagetsi zotetezera kutentha.

Ubwino wake ndi monga:

l Kuyera kwambiri kwa mankhwala

l Makhalidwe abwino a dielectric

l Khalidwe lokhazikika lamagetsi

Komabe, quartz ili ndi kutentha kochepa komanso kukana kochepa ku mankhwala amphamvu a plasma monga mpweya wopangidwa ndi fluorine.

4. Mphete Zoyang'ana za Quartz zimapezeka nthawi zambiri mu:

l Njira zokhwima za semiconductor

l Machitidwe a PECVD

l Kugwiritsa ntchito plasma yotsika mphamvu

Pakupanga zinthu zapamwamba kwambiri, quartz pang'onopang'ono ikusinthidwa ndi SiC ndi zipangizo zapamwamba za ceramic.

5. Alumina (Al₂O₃Mphete Yoyang'ana

Mphete Zoyang'ana za Alumina ceramic zimapereka mphamvu yabwino yamakina, kutchinjiriza magetsi, komanso zabwino pamtengo.

Amagwiritsidwa ntchito kwambiri mu:

l Kudula kwa plasma wamba

l Zigawo za zida za semiconductor

l Malo ocheperako a plasma

Ngakhale alumina imapereka kukana koyenera kwa plasma, magwiridwe ake akagwiritsidwa ntchito kwambiri pakakhala fluorine plasma nthawi zambiri amakhala otsika poyerekeza ndi SiC kapena yttria-based ceramics.

6. Yttria (Y₂O₃Mphete Yoyang'ana

Yttria ceramic yakopa chidwi chowonjezeka mu kupanga ma semiconductor apamwamba chifukwa cha kukana kwake kwambiri ku fluorine plasma.

Ubwino waukulu ndi:

l Kupanga tinthu tating'onoting'ono kochepa kwambiri

l Kukana bwino kwambiri dzimbiri la plasma

l Nthawi yayitali yogwira ntchito

Mphete Zoyang'ana za Yttria zimagwiritsidwa ntchito makamaka mu:

l Kupanga zinthu zokumbukira zapamwamba

l Kujambula kwa chiŵerengero cha mbali (HAR)

l Njira zotsatizana za plasma za m'badwo wotsatira

Cholepheretsa chachikulu ndi mtengo wokwera wopanga chifukwa cha zovuta zokonzera zinthu za ceramic.

Kuyerekeza kwa Mphete Yoyang'ana pa Semiconductor

Kodi Mungasankhe Bwanji Mphete Yoyang'ana Bwino Pojambula Plasma?

Kusankha mphete yoyenera ya Plasma Etching Focus Ring kumafuna kulinganiza magwiridwe antchito a ntchito, kulimba kwa zinthu, ndi mtengo wonse wa umwini.

Zinthu zofunika kwambiri pakuwunika ndi izi:

1. Kugwirizana kwa Plasma Chemistry

Mpweya wosiyanasiyana monga CF₄, CHF₃, NF₃, SF₆, ndi Cl₂ pangani malo osiyanasiyana okhala ndi dzimbiri. Zipangizo ziyenera kusankhidwa malinga ndi momwe zimakhalira ndi plasma.

2. Kukhazikika kwa Kutentha kwa Njira

Njira zamakono zopangira utoto zimapangitsa kuti kutentha kukhale kovuta kwambiri. Zipangizo zomwe zimakhala ndi kutentha kwambiri komanso kutentha kochepa, monga SiC, zimapereka kukhazikika kwabwino.

3. Kulamulira Tinthu Tating'onoting'ono

Kwa ma node apamwamba a semiconductor, kuipitsidwa kwa tinthu kumakhudza mwachindunji phindu. Zipangizo za SiC ndi yttria zoyera kwambiri zimapereka kukhazikika kwabwino pamwamba komanso kupanga tinthu tating'onoting'ono kochepa.

4. Moyo Wonse Ndi Kugwiritsa Ntchito Ndalama Moyenera

Ngakhale kuti zinthu zopangira ceramic zapamwamba zingakhale ndi ndalama zambiri zoyambira, nthawi yawo yayitali komanso kuchepa kwa nthawi yokonza zinthu zimatha kuchepetsa kwambiri ndalama zogwirira ntchito za zida zonse.

Ibibazo

Q1: Kodi Mphete Yoyang'ana pa Semiconductor ndi chiyani?

Mphete Yoyang'ana pa Semiconductor ndi gawo lowongolera plasma lomwe limayikidwa mozungulira m'mphepete mwa wafer mu zida zouma zomangira. Zimathandiza kusunga kufalikira kwa plasma kofanana komanso kukonza magwiridwe antchito a wafer m'mphepete.

Q2: Nchifukwa chiyani SiC imagwiritsidwa ntchito pa semiconductor Focus Rings?

SiC imagwiritsidwa ntchito kwambiri chifukwa cha kukana kwake dzimbiri kwa plasma, kutentha kwambiri, mphamvu ya makina, komanso kupanga tinthu tating'onoting'ono tochepa, zomwe zimapangitsa kuti ikhale yoyenera kugwiritsa ntchito njira zapamwamba zolembera.

Q3: Ndi zipangizo ziti zomwe zimagwiritsidwa ntchito pa Semiconductor Focus Rings?

Zipangizo za Common Focus Ring zikuphatikizapo Silicon, Quartz, Silicon Carbide (SiC), CVD SiC, Alumina, ndi Yttria (Y).₂O₃) zoumbaumba.

Q4: Kodi ndingasankhe bwanji zinthu zoyenera za Focus Ring?

Kusankha kumadalira kapangidwe ka plasma, kutentha kwa njira, zofunikira pakudula, kuwongolera kuipitsidwa, ziyembekezo za moyo wonse, komanso mtengo wonse wa umwini.

Q5: Kodi kusiyana pakati pa Silicon ndi SiC Focus Rings ndi kotani?

Ma Silicon Focus Rings amapereka njira yabwino kwambiri yogwiritsira ntchito pokonza silicon, pomwe SiC Focus Rings imapereka kukana bwino kwa plasma, nthawi yayitali, komanso kukhazikika bwino kwa njira zapamwamba za semiconductor.