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Pazophimba zapadera pa graphite, CVD TaC ndi Kupaka kwa cvd Mbali zina za makina opangira ma chip otentha kwambiri, kugwira ntchito kwa chophimbacho ndikofunika kwambiri pa moyo wa ziwalozo. Kugwirizana kofooka kumayambitsa ming'alu yaying'ono ndi peel panthawi yotentha ndi yozizira, zomwe zimapangitsa kuti zinthu ziipire kapena chitetezo chosafanana chisagwire ntchito komanso kulephera kwa njirayi. Mbali zambiri zimawoneka bwino kuyambira ku fakitale ndipo m'mphepete mwake zimatuluka pambuyo pozigwiritsa ntchito kangapo. Chifukwa chake, mphamvu ya mgwirizano iyenera kuyesedwa magawo omwe amagwiritsidwa ntchito ku fakitale asanayambe kulephera kuti makinawo asawonongeke mwadzidzidzi.
Mayeso Okhazikika Otsatira a CVD TaC Coating pa Graphite Substrates
Kuti mudziwe mphamvu zake, mayeso angapo ofunikira amachitidwa m'mafakitale; choyamba ndi mayeso okanda. Apa, nsonga ya diamondi imakokedwa pamwamba pa chophimbacho ndi mphamvu yowonjezera, ngati filimuyo ing'ambika, ikatuluka kapena kuchotsedwa pa graphite wosanjikiza msanga, imasonyeza kusagwira bwino ntchito. Iyi ndi mayeso osavuta koma amasonyeza zotsatira zomveka bwino ziwalo zisanayambe kugwira ntchito.
Kuyesa kwina kwachangu ndi kuyesa tepi komwe tepi yomatira imayikidwa pa filimuyo kenako nkuchotsedwa; ngati ma flakes atuluka ndi tepiyo, mgwirizano ndi maziko a graphite ukhoza kukhala wofooka. Iyi ndi mayeso oyamba achangu omwe amagwiritsidwa ntchito m'ma laboratories mayeso okhwima asanachitike.
Kutentha ndi kuziziritsa mobwerezabwereza nakonso n'kotchuka kwambiri, chifukwa njirayi imatsanzira bwino kwambiri kugwiritsa ntchito kwenikweni. Zophimba zolimba siziwonetsa zotsatirapo zoyipa, pomwe zophimba zofooka zimayamba kusweka kapena kusweka m'mphepete. Pa nthawi ina ya fakitale, zophimbazo zinalephera pakuwunika kwachiwiri zitatenthedwa mobwerezabwereza (kusweka m'mphepete) ngakhale izi zinali chifukwa cha kuipitsidwa kwa substrate isanayambe kugwiritsidwa ntchito.
Kuyesa kochotsa (komwe stud imamatiridwa ku chophimba kenako nkukokedwa mpaka choyikapocho chitachoka) ndiye mayeso ena, omwe amapereka phindu pa continuum, ndi abwino poyerekeza magulu koma angatenge nthawi yayitali kuti achite. Kuyesa kolowera mkati kumagwiritsidwa ntchito ngati mayeso owoneka bwino komanso oyezera, komwe mfundo yolimba imalowetsedwa mu chophimbacho ndipo kuchuluka kwa ming'alu kumayesedwa. Ngati achitidwa bwino pamodzi, mayesowa amatsimikizira kuti chophimbacho chili bwino.
Zizindikiro Zoyambirira za Kupukuta kwa TaC mu Kugwiritsa Ntchito Epitaxy
Mitundu iyi ya makina ili ndi nthawi zochepa kwambiri pomwe kugawanika kwa utoto kumachitika mosayembekezereka. Nthawi zambiri kusintha pang'ono kumachitika m'gawolo, zomwe sizimadziwika. Kusintha kwa utoto kumawonekera msanga. Mtundu watsopano uyenera kuwoneka wofanana komanso wosalala koma pansi pa kupsinjika, mbali ina imawoneka yofiirira, makamaka m'mphepete, m'makona ndi m'malo omwe kutentha kwambiri kumakwera.
Nthawi zambiri pamakhala kukweza pang'ono m'mphepete komwe kumawoneka ngati chophimba choyimirira pamalire ngati kuwonedwa mu kuwala pa ngodya yoyenera kapena pakukula kwakukulu. Mu mzere wina wa fakitale, wogwira ntchito yoyeretsa anaona tinthu tating'onoting'ono ta fumbi pafupi ndi m'mphepete mwa gawolo, ndipo adapeza kuti kuphulika kunali kale kuyambira pamphepete.
Ming'alu ya tsitsi imasonyezanso vuto. Ming'alu yoyamba ndi yabwino komanso ya pamwamba ndipo imawonekera m'malo omwe kutentha kumachepa, pamapeto pake imalumikizana ndikupanga madera akuluakulu a spalling ngati ming'aluyo sinakonzedwe. Zizindikiro zina zosaoneka bwino zimaphatikizapo kuchuluka kwa tinthu tating'onoting'ono kapena fumbi mkati mwa chipindacho.
Ngakhale kuti palibe cholakwika chilichonse chomwe chikuwoneka pa chophimbacho, tinthu tating'onoting'ono tingatuluke pa chophimbacho panthawi yogwira ntchito ndipo tingawonekere pa ma monitor chisanachitike ngozi yaikulu. Kukhwima kumatha kuwonjezeka, pamene chophimba chomwe chinali chosalala chimawoneka ngati tinthu tating'onoting'ono chifukwa cha kuwonongeka kwa gawo lapamwamba la chophimbacho.
Chifukwa cholakwika chaching'ono chomwe chili m'mphepete mwake chingakule kwambiri chomwe chingasokoneze ubwino wa makina ndipo chimapangitsa kuti makina asamagwire ntchito nthawi yayitali, kuzindikira zizindikiro zoyambirirazi ndikofunikira.
Zotsatira za Kutentha kwa Kutentha pa Zigawo za Epitaxial Zophimbidwa ndi CVD TaC
Popeza zinthu zophimbidwa zimatenthedwa mobwerezabwereza ndi kuziziritsidwa masana, pamakhala kupsinjika kwakukulu komwe kumachitika pa utotowo pakapita nthawi. Zinthuzo zikatenthedwa, utotowo ndi graphite zimakula, koma pamlingo wosiyana. Chifukwa chake, kutentha kulikonse kumakula pakati pa zinthu ziwiri zomwe zili pamalo olumikizirana. Pamene chinthucho chimazizira, kupsinjika kumatembenukira mbali ina. Kutentha ndi kuzizira kamodzi sikubweretsa kuwonongeka kulikonse, komabe pazaka mazana ambiri zoterezi, kupsinjika pang'ono kwamkati kumachitika.
Chophimbacho chidzakhala chosalala komanso chokhazikika, koma pambuyo pobwerezabwereza kusintha kwa kutentha, malo ang'onoang'ono opsinjika amapangika m'mphepete mwakuya kapena kutentha kosagwirizana. Pakati pa chigawocho padzakhala nthawi yayitali, kunja kwa chigawocho kudzakhala kutha mu zida zenizeni. Mng'alu yaying'ono m'mphepete mwa zigawozo ndi chitsanzo chodziwika bwino, ikagwiritsidwa ntchito kangapo imatha kukula m'mphepete ndipo imayamba kukula pamene kupsinjika kumaipangitsa kugawanika pambuyo pa kutentha kulikonse ndipo zidutswa zazing'ono zimatuluka.
Ndi kutentha ndi kuzizira mobwerezabwereza, mkati mwake umatha, kotero kuti zigawo zochepa zimapambana mayeso oyamba, komabe zikagwiritsidwa ntchito kwa nthawi yayitali (miyezi ingapo) zimakhalabe zosavuta kuwonongeka. Nthawi ina, zigawo zina zayamba kung'ambika patatha zaka mazana angapo chifukwa cha kutentha mwachangu komwe kumabweretsa kupsinjika kwakukulu m'malo motentha pang'onopang'ono.
Njira Zokonzekera Patsogolo Pamwamba Zothandizira Kulimbitsa Kugwirizana kwa Ma Coating
Pali kukonzekera kwakukulu komwe kuyenera kuchitika pazigawo za graphite musanagwiritse ntchito mtundu uliwonse wa chophimba kuti gawoli ligwirizane. Kukonzekera kosayenera pa chophimba chabwino kumangopangitsa kuti chophimbacho chilephereke msanga. Kuyeretsa kwambiri gawo la graphite ndi gawo limodzi la kukonzekera kumeneku. Graphite imasunga mosavuta fumbi lochepa kwambiri, mafuta otsala, kapena tinthu tating'onoting'ono tomwe timapanga mkati mwa pores ake. Zinthuzi zimaletsa chophimbacho kuti chisakhudze mwachindunji maziko ake.
Ngakhale filimu ya mafuta yooneka ngati kansalu kakang'ono kwambiri imapanga malo ofooka mu chomangira, zomwe zidzakhala malo oti kung'ambika kuyambe. Njira zoyeretsera zapadera nthawi zambiri zimagwiritsidwa ntchito kapena nthawi zina gawolo limaphikidwa mu uvuni kuti lichotse zotsalira zilizonse zomwe zili pansi.
Chotsatira ndikuwonetsetsa kuti pamwamba pake pakhala pakuda pang'ono kuti pakhale kugwira bwino kwa chophimba kuposa momwe pamwamba pake pakanakhala kosalala bwino. Izi nthawi zambiri zimachitika mwa kuphulitsa mchenga kapena kugwiritsa ntchito zida zamakina kuti pakhale malo ogwirira ouma koma okhazikika kuti chophimbacho "chigwirizane" ndi makina, kapena pogwiritsa ntchito mankhwala a plasma omwe amathira mpweya pang'ono pamwamba pa graphite kuti ayambe kugwira ntchito ndikupangitsa kuti chigwirizane ndi zinthu zophimba popanda zotsatirapo zoyipa pa mawonekedwe a substrate.
Mankhwala otenthetsera kutentha kwa zigawo za graphite amagwiritsidwa ntchito musanaphike, chifukwa kuphika kwa gawolo kutentha kwambiri kumatha kutulutsa mpweya wotsekeka mkati mwa chinthucho. Mpweya uwu ukhoza kutuluka pamene chophimba chikuyikidwa, zomwe zimapangitsa malo abwino kwambiri okhala ndi malo ofooka kapena matuza pansi pa chophimbacho. Njirazi nthawi zambiri zimagwirizanitsidwa.
Kusanthula Kolephera kwa Mphete Zokutidwa ndi TaC Zomwe Zimagwiritsidwa Ntchito mu Machitidwe a LPE (ASM)
Mphete za graphite zophimbidwa zimagwira ntchito pamikhalidwe yovuta kwambiri kuphatikizapo kutentha kwambiri, mpweya wambiri, komanso kutentha. Njira zolephera za mphete za graphite zophimbidwa nthawi zambiri zimagwirizanitsidwa ndi kupsinjika kwa kupaka, ubwino wa pamwamba komanso kutopa kwa kutentha.
Kuchotsa m'mphepete mwa m'mphepete kumene utoto umatha kuchoka m'mphepete mwa m'mphepete mwa m'mphepete ndi m'mbali zoonda chifukwa zimazizira mofulumira komanso kutentha poyerekeza ndi zigawo zazikulu. Pambuyo poyambitsa kukweza m'mphepete, chodabwitsachi chimakula mofanana ndi zipi yotseguka m'mphepete mwa m'mphepete.
Kung'ambika pang'ono kungachitike pamwamba pa mpweya komwe mpweya umatuluka kwambiri ndipo kumapanga malo otentha kwambiri m'deralo. Fumbi lakuda lochepa linapezeka mu dongosolo lina lomwe lagwirizanitsidwa ndi ming'alu yaying'ono pakhoma lamkati la mphete. Kulephera kwa mgwirizano wa interface ndi njira ina yofunika; kusagwirizana kofooka pansi pa wosanjikiza kumachitika chifukwa cha kutuluka mwadzidzidzi kwa malo akuluakulu omwe nthawi zambiri amachoka pamwamba pomwe sanatsukidwe bwino kapena mpweya womwe umatsekeredwa pamalo omwe amakula.
Kusinthasintha kwa kutentha mwachangu, kumbali ina, kumabweretsa kugwedezeka kwa kutentha komwe kupsinjika kwa kutentha kumatha kukulirakulira mwachangu pamalo olumikizirana/maziko. Mu njira imodzi yopangira mphete imangokhala miyezi ingapo yokha. Ngakhale poyamba inkaoneka ngati yachibadwa, mulingo wa tinthu tating'onoting'ono unakwera pang'onopang'ono ndipo atachotsedwa gawo lalikulu la utotowo linagawanika pafupi ndi malo olumikizira.
Kulephera kumeneku kunabwera chifukwa cha kutentha kosafanana komanso kuyeretsa bwino m'mphepete musanaphike. Ngakhale kuti kulephera kumeneku nthawi zambiri kumakula chifukwa cha zolakwika zazing'ono pakapita nthawi, kuyang'anitsitsa nthawi zonse komanso kutentha kokhazikika kwa kutentha kungakhale njira zabwino zopewera kulephera kwamtunduwu.
M'ndandanda wazopezekamo
- Mayeso Okhazikika Otsatira a CVD TaC Coating pa Graphite Substrates
- Zizindikiro Zoyambirira za Kupukuta kwa TaC mu Kugwiritsa Ntchito Epitaxy
- Zotsatira za Kutentha kwa Kutentha pa Zigawo za Epitaxial Zophimbidwa ndi CVD TaC
- Njira Zokonzekera Patsogolo Pamwamba Zothandizira Kulimbitsa Kugwirizana kwa Ma Coating
- Kusanthula Kolephera kwa Mphete Zokutidwa ndi TaC Zomwe Zimagwiritsidwa Ntchito mu Machitidwe a LPE (ASM)
Semixlab Technology Co., Ltd, yomwe idakhazikitsidwa mu 2018, ndi kampani yozikidwa paukadaulo yomwe imayang'ana kwambiri kafukufuku ndi chitukuko, kupanga ndi kugulitsa zipangizo zapamwamba. Ndi kampani yotsogola padziko lonse yopanga zinthu za semiconductor.
