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Chosungira cha CVD SiC Wafer
Zogwirizira za Semixlab za SiC zimapangidwa ndi graphite yolimba kwambiri, kenako n’kupakidwa ndi CVD silicon carbide yoyera kwambiri. Zimapangidwa kuti zigwirizane ndi zovuta zomwe zili mkati mwa MOCVD ndi epitaxy reactors. Zotsatira zake: kutentha kofanana bwino pa wafer, komanso kuipitsidwa kochepa kwachitsulo - zomwe zimathandiza mwachindunji kuti chipangizo chanu chigwire bwino ntchito komanso kuti chizigwira ntchito bwino.
Kufotokozera
Mu epitaxy ya semiconductor yophatikizika - monga GaN-on-Si, GaN-on-saphire, kapena MicroLED yopangidwa - chogwirira cha wafer (nthawi zina chimatchedwa susceptor yokhala ndi SiC) ndi gawo lofunika kwambiri. Chimakhala pakati pa chotenthetsera ndi wafer ndipo chimayang'anira kutentha kwambiri.
Nchifukwa chiyani mainjiniya amasankha zogwirira za Semixlab SiC?
● 7-nines purity (zonse zitsulo < 5 ppm) - Timagwiritsa ntchito njira ya CVD (yopangidwa ndi Pulofesa Shaolong He) yomwe imasunga zitsulo zochepa monga Fe, Cu, ndi Ni zochepa kwambiri. Izi zikutanthauza kuti zolakwika zochepa za lattice panthawi ya kukula kwa GaN.
● Kugwirizana bwino kwa kutentha (±1%) – Filimu ya CVD SiC ili ndi kutentha kwakukulu (~300 W/m·K). Kutentha kumafalikira mofulumira komanso mofanana, zomwe zimathandiza kuchepetsa kupsinjika kwa kutentha ndi kutentha.
● Kukana mwamphamvu ku H₂ ndi NH₃ dzimbiri – Mosiyana ndi graphite kapena quartz, chophimba chathu cha SiC chokhuthala chimakhalabe chopanda madzi pansi pa kutentha kwambiri kwa ammonia ndi hydrogen flows (900–1200 °C). Tinthu tating'onoting'ono timachepa, ndipo gawolo limakhala nthawi yayitali nthawi 3–5.
● Kufananiza kwa CTE - Chovala chapadera chosinthira ma gradient chimasunga kuchuluka kwa kutentha pakati pa chophimba ndi graphite kukhala kogwirizana bwino. Palibe kugawanika kapena kusweka, ngakhale panthawi yofulumira komanso yotsika.
zofunika
| chizindikiro | Mtengo Wapatali | Chifukwa Chiyani Kuli Kofunika |
| Zovala zokutira | 99.99999% CVD SiC | Palibe kutayikira kwa ayoni kapena kuipitsidwa ndi zitsulo zolemera |
| Gawo lapansi | Graphite yotsika kwambiri | Imasunga mphamvu pa 1600 °C |
| Kutentha kwa kutentha | ~300 W/m·K (pa RT) | Kukhuthala kwa EPI yofanana |
| Kupaka kuuma | ~2500 HV (Vickers) | Imakana kuwonongeka chifukwa chotsitsa/kutsitsa zinthu zokha |
| Pamaso kukwiya | Ra < 0.2 μm | Kuchepa kwa ma polima ndi zinthu zina |
| ngakhale | makonda | Kulondola kogwirizana ndi zofunikira zanu zosintha |
Mapulogalamu
Zochitika zazikulu zogwiritsira ntchito
● GaN-on-Si / GaN-on-sapphire epitaxy - Yofunika kwambiri pa zipangizo zamagetsi ndi ma RF chips, komwe kukhazikika kwa kutentha kwapafupi kumakhudza mwachindunji kuyenda kwa magetsi kwa gawo la GaN.
● Ma MicroLED ndi zowonetsera zapamwamba - Zimafunika kuyera kwambiri komanso tinthu tating'onoting'ono tochepa kwambiri, zomwe chogwirira chathu chimapereka kuti zikhale ndi ma LED ambiri.
● Kukula kwa makristalo a SiC (PVT) - Kumagwira ntchito ngati chonyamulira champhamvu kwambiri cha zinthu zoyambira za SiC, ndipo kumatha kuthandizira kukula mpaka ~1.46 mm/h.
● Kukonza mwachangu kutentha (RTP) - Chogwiriracho chimatha kuthana ndi kutentha kwambiri panthawi yopumira mwachangu popanda kusweka pang'ono.
Mpikisano Wopikisana
Ubwino wa Semixlab
Sitili ogulitsa okha - timayesetsa kukhala ogwirizana nanu pa zosowa zanu za kutentha. Semixlab idakhazikitsidwa ndi ofufuza ochokera ku Chinese Academy of Sciences, ndipo timayendetsa mizere yopitilira 12 yopangira CVD. Tilinso ndi makina opangira ma CNC a 5-axis mkati, kotero titha kupanga zogwirira za wafer zokhala ndi zolekerera zolimba ngati ± 0.01 mm. Izi zikutanthauza kuti zimagwera m'zida zanu zapadziko lonse lapansi popanda kuyikapo zowonjezera.
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