Zida za ArF Photoresist za Photolithography

Zithunzi za Semixlab Photoresist

Photoresist amatanthauza etching- zosagwira woonda filimu zakuthupi amene solubility kusintha pansi pa kuwala kapena cheza cha ultraviolet kuwala, elekitironi mtengo, ayoni mtengo X-ray, etc. Photoresist ali ndi udindo wapadera mu Integrated dera Chip kupanga ndondomeko. Kuphatikizika kwapamwamba kwa dera lophatikizika, kumapangitsanso zofunikira za photoresist. Semiconductor photoresists amagawidwa mu g-line, i-line photoresists, KrF, ArF photoresists ndi EUV photoresists, pakati pawo njira ya ArF photoresist ndi 7nm - 130nm.

Malo athu a R&D amatha kupanga ma monomers ogwira ntchito, ma resins ogwirira ntchito, ma photosensitizers ndi zida zina za photoresist, ndipo amatha kupeza ufulu wodziyimira pawokha kuchokera kuzinthu zopangira ma photoresist kupita ku zinthu za photoresist ndi zida zothandizira. Pakadali pano, kutsimikizira kwa ojambula zithunzi apamwamba kwambiri monga ArF dry process, KrF thick film glue, and I-line ikupita patsogolo pang'onopang'ono, ma ArF photoresists atatu atsimikiziridwa, zomwe zimatsimikizira kuti titha kupereka mayankho omwe amagwirizana ndi zomwe zachitika posachedwa m'munda wa semiconductor.

ntchito:

Zipangizo za ArF photoresist ndi zida zofunika kwambiri pakupanga madera ophatikizika ndipo zitha kugwiritsidwa ntchito popanga ma 90nm ~ 14nm komanso ukadaulo wa 7nm. Amagwiritsidwa ntchito kwambiri popanga madera ophatikizika, kuyika kwapamwamba kwa 3D-IC, kuyika kwachikhalidwe kwa IC ndi kuyesa, ndi magawo ena. Amagwiritsidwa ntchito kwambiri popanga ma chip apamwamba kwambiri, kuphatikiza ma logic chips, tchipisi ta AI, tchipisi ta 5G, tchipisi tambiri, ndi tchipisi ta mtambo.

Services zomwe zingaperekedwe:

kusanthula zochitika zamakasitomala, zida zofananira, kuthetsa mavuto aukadaulo.

Mbiri Yakampani:

Semixlab ili ndi ma laboratories awiri, gulu la akatswiri omwe ali ndi zaka 2 zachidziwitso chakuthupi, ndi R&D ndi kupanga, kuyesa ndi kutsimikizira.

Tsatanetsatane wazomwe:

1. Ntchito yayikulu: Imagwiritsidwa ntchito kwambiri m'magawo monga kupanga madera ophatikizika, ma CD apamwamba a 3D-IC, komanso kuyika ndi kuyesa kwachikhalidwe kwa IC. Ndipo kupanga ma chip apamwamba kwambiri, kuphatikiza tchipisi ta logic, tchipisi ta AI, tchipisi ta 5G, kukumbukira kwakukulu ndi tchipisi ta mtambo, ndi zina zambiri.

2. Core specifications parameters:

Gawo lapansi Si(HMDS), filimu makulidwe 1.25μm, chisanadze kuphika 100 ℃ 60sec, kukhudzana 120 ℃ 90sec, kusamvana 7nm ~ 90nm, alumali moyo theka la chaka, kusungidwa kutentha otsika, osapitirira 20 ℃.

Kugwira ntchito

Minda yofunsira

Kutsimikizira kwa Ecological chain verification

193nm ArF photoresist yatsimikiziridwa ndi opanga ma chip awiri, kusungirako ndi malingaliro, kukhala chinthu choyamba cha ArF photoresist kupita ku China.

Njira yodziwika bwino yogwiritsira ntchito

Kukonzekera kwazinthu zopangira → Kutsuka kachidutswa kakang'ono → Kuyeretsa wosanjikiza wa photoresist(kutsuka zosungunulira kapena kuyeretsa plasma) → Kukonzekera (kuyeretsa asidi ndi kuyatsa pamwamba) → Kuwongolera makulidwe a gawo la photoresist → Kupaka ndi kupanga filimu → Kuwonekera ndi chitukuko → Kuteteza etching → Kukonza kotsatira (kuvula, kuyeretsa ndi kulumikiza)

Kupyolera mu kukhathamiritsa kwa ndondomekoyi, Semixlab photoresist yapeza bwino kwambiri m'munda wa photoresist wamakono apamwamba, pang'onopang'ono m'malo mwa malonda a semiconductor photoresist msika, ndipo wakhala akugwiritsidwa ntchito bwino pakupanga ndi kupanga LCD, OLED ndi mapanelo ena owonetsera. Ngati mukufuna kupeza zikalata zoyera zaukadaulo kapena kukonza zoyeserera, lemberani gulu lathu lothandizira zaukadaulo.

Ubwino wa Semixlab Photoresist Core

Ubwino wa magwiridwe antchito

Kusamvana kwakukulu: kumapangitsa mawonekedwe ozungulira pa chip kukhala oyengeka kwambiri, kuwongolera kuphatikiza ndi magwiridwe antchito a chip.

Kusiyanitsa kwakukulu ndi kutumizirana kwakukulu: kumathandiza kukwaniritsa bwino kusamutsidwa kwa chitsanzo panthawi ya lithography, kupititsa patsogolo kulondola ndi luso la lithography, motero kumawonjezera zokolola ndi kudalirika kwa chip.

Ubwino wa kafukufuku waukadaulo ndi chitukuko

Pezani ufulu wonse kuchokera ku zipangizo za photoresist kupita ku zinthu za photoresist ndi zipangizo zothandizira.

ArF photoresist yatsimikiziridwa kuti ili ndi chip 50nm chamakasitomala otsika komanso logic chip 55nm technology node product.

Kukula kwamphamvu ndi kupanga zochuluka

Tidzafika pakupanga matani 25 pachaka a 193nm (ArF youma ndi kumiza) zinthu za photoresist, zomwe zidzagwiritsidwe ntchito popanga mafakitale a photoresist ndi zida zothandizira kuti zikwaniritse zosowa zamagawo ophatikizika.