Mphete Yophimba ya Quartz ya 0200-09911

Mphete Yophimba ya AMAT 0200-09911 Quartz ndi gawo la quartz lopangidwa mwaluso kwambiri lopangidwa kuti ligwiritsidwe ntchito mumakina odulira plasma. Limagwira ntchito ngati mphete yoteteza komanso yowongolera njira yomwe imayikidwa mkati mwa chipinda chodulira pulasitiki, makamaka m'mapulatifomu opangira ma wafer a 200mm.

Chopangidwa kuchokera ku quartz yoyera kwambiri, gawo ili limakonzedwa bwino kuti ligwiritsidwe ntchito m'malo ovuta kwambiri a semiconductor omwe amadziwika ndi:

● Kupezeka kwa plasma yamphamvu kwambiri

● Mpweya wa mankhwala wochita zinthu mopupuluma (monga mankhwala ochokera ku fluorine)

● Kutentha kwachangu

Ku Semixlab Technology, mankhwalawa amapangidwa ndi ulamuliro wokhwima pa:

● Kuyera kwa zinthu (kuipitsidwa pang'ono kwa chitsulo)

● Kulekerera kwa miyeso (kofunikira kwambiri pakuwongolera njira zogwirira ntchito m'mphepete)

● Kumaliza pamwamba (kuchepetsa kupanga tinthu tating'onoting'ono)

Izi zimatsimikizira kuti magwiridwe antchito okhazikika munjira zapamwamba zopangira semiconductor.

Common Kulephera Modes

Monga gawo logwiritsidwa ntchito lomwe limagwira ntchito pansi pa mikhalidwe yovuta ya plasma, mphete Yophimba ya Quartz imawonongeka ndi njira zingapo:

1. Kuwonongeka Koyambitsidwa ndi Plasma

● Kuphwanyika kwa pamwamba chifukwa cha kuphulika kwa ayoni

● Kusintha pang'onopang'ono kwa mawonekedwe a zinthu zomwe zatayika

Zotsatira: Kuchepa kwa kufanana kwa etch ndi magwiridwe antchito osakhazikika

2. Kuyika ndi Kuipitsa Mankhwala

● Kuchulukana kwa polima kapena zinthu zina pamwamba

● Kutuluka kapena kusweka pamene kutentha kumasinthasintha

Zotsatira: Kupanga tinthu tating'onoting'ono ndi kuipitsidwa kwa wafer

3. Kusweka kwa Kutentha

● Kutentha ndi kuziziritsa mobwerezabwereza kumayambitsa ming'alu yaying'ono

● Kufalikira kwa ming'alu komwe kumabweretsa kulephera kwa kapangidwe kake

Zotsatira: Kusweka mwadzidzidzi ndi nthawi yopuma yosakonzekera

4. M'badwo wa Tinthu

● Kukalamba kwa quartz kumabweretsa kusweka kwa tinthu tating'onoting'ono

● Kuwonongeka kwa pamwamba kumatulutsa tinthu tating'onoting'ono m'chipindamo

Zotsatira: Kutaya kwa zokolola ndi chilema kumawonjezeka

Chifukwa Chiyani Sankhani Ukadaulo wa Semixlab?

Ku Semixlab Technology, timaphatikiza ukatswiri wozama wa njira za semiconductor ndi luso lapamwamba lopanga quartz kuti tipereke:

● Zipangizo za quartz zoyera kwambiri kuti zigwiritsidwe ntchito bwino kwambiri

● Kupanga zinthu mwanzeru kuti zigwirizane ndi OEM yeniyeni

● Kugwira ntchito bwino kwa moyo wonse kuti muchepetse mtengo wa umwini (CoO)

● Kuwongolera khalidwe kolimba kumagwirizana ndi miyezo ya semiconductor fab

Ziwalo zathu zosinthira zimapangidwa kuti zikwaniritse kapena kupitirira zomwe OEM ikufuna, kuonetsetsa kuti zimagwirizana bwino komanso kuti zimagwira ntchito bwino m'malo ovuta.

Udindo mu Zida ndi Ntchito Yogwira Ntchito

Unsembe Udindo

Mphete Yophimba ya Quartz nthawi zambiri imayikidwa:

● Kuzungulira dera la m'mphepete mwa wafer

● Pafupi ndi electrostatic chuck (ESC) perimeter kapena pafupi ndi

● Mkati mwa malo owonetsera plasma a chipinda chokokeramo

Imagwira ntchito ngati gawo la gulu lowongolera m'mphepete, ikugwira ntchito limodzi ndi zinthu monga mphete zoyang'ana ndi mphete zamthunzi.

Ntchito Zazikulu

1. Chitetezo cha Chipinda ndi Zigawo

Mpheteyi imagwira ntchito ngati chotchinga chodzipereka, choteteza zigawo zofunika kwambiri (monga ma ESC ndi makoma a chipinda) ku:

● Kuphulika kwa plasma mwachindunji

● Kutupa kwa mankhwala

● Kutulutsa madzi chifukwa cha ayoni

Izi zimawonjezera kwambiri moyo wautumiki wa zigawo za chipinda chamtengo wapatali.

2. Kuwongolera Mphepete mwa Plasma ndi Kukhazikika kwa Njira

Ma geometry opangidwa mwaluso (monga, ma profiles oyenda ndi mawonekedwe odulidwa) amathandiza:

● Yang'anirani kufalikira kwa plasma sheath pafupi ndi m'mphepete mwa wafer

● Chepetsani kupotoka kwa zotsatira za m'mphepete

● Kuwongolera kufanana kwa etch ndi kulamulira CD (gawo lofunika kwambiri)

Izi ndizofunikira kwambiri makamaka pakusintha kwa njira zolondola kwambiri.

3. Kuyenda kwa Gasi ndi Kasamalidwe ka Zogulitsa Zina

Mphete yophimba imathandiza ku:

● Kuyenda kwa mpweya wolamulidwa pamphepete mwa wafer

● Kuchulukana kwa ma polima m'malo osafunikira

● Kukhazikika kwa chipinda pakapita nthawi yayitali

Izi zimathandiza mwachindunji kubwerezabwereza ndi kukweza zokolola.