Kupaka kwa CVD Silicon Carbide (SiC).

Chophimba cha CVD SiC kwenikweni ndi gawo la silicon carbide lomwe limayikidwa pa graphite, ndipo limagwiritsidwa ntchito kwambiri mu zida za epitaxy komwe kutentha ndi ukhondo ndizofunikira. Mu mizere yeniyeni yopangira, nthawi zambiri mumawona mumakina ochokera ku AIXTRON, ASM/LPE, Veeco, komanso mapulatifomu ena okhudzana ndi AMAT. Chomwe chimapangitsa kuti chikhale chothandiza si kukana kutentha kokha, komanso kukhazikika konse pakapita nthawi yayitali. Mu mikhalidwe yanthawi zonse ya epitaxy - hydrogen, ammonia, kapena mpweya wa chlorine - chophimbacho chimakhala chokhazikika bwino ndikuteteza graphite yomwe ili pansi pake. Izi zimathandiza kuti mphamvu ya kutentha ikhale yofanana komanso kuchepetsa mwayi wa tinthu tating'onoting'ono tomwe timaonekera panthawi yomera.

Nthawi zambiri, chophimbacho chimayikidwa pazigawo monga zotetezera, zonyamulira ma wafer, mphete za graphite, kapena zigawo za theka la mwezi. Zonsezi zimagwiritsidwa ntchito mwachindunji pakutenthetsa kapena kuyika ma wafer, kotero kusakhazikika kulikonse pang'ono kungakhudze kuchuluka kwa zinthu. Pachifukwa ichi, zigawo zophimbidwa nthawi zambiri zimaonedwa ngati zogwiritsidwa ntchito zomwe zimafunikirabe kukhala zodalirika pakapita nthawi zingapo, makamaka popanga mainchesi 4 mpaka 12.