SiC yokutidwa ndi Graphite Satellite chivundikiro cha MOCVD

SiC yokutidwa ndi graphite satellite chivundikiro ndi gawo lofunika kwambiri mu machitidwe a MOCVD (Metal-Organic Chemical Vapor Deposition), opangidwa makamaka kuti atsimikizire kukhazikika, kukhazikika, ndi ukhondo panthawi ya kukula kwa epitaxial kwa GaN, SiC, GaAs, ndi zipangizo zina za semiconductor. Womangidwa pamunsi wa isostatic graphite ndipo wokutidwa ndi chiyero chapamwamba cha CVD SiC, chimaphatikiza zinthu zabwino kwambiri zotenthetsera ndi kukana kwamphamvu kwamankhwala, kukwaniritsa zofunikira zopanga zida zam'mibadwo yotsatira.

Zofunika & Makhalidwe Athupi

Gawo la Graphite: Fine-grain isostatic graphite, yopereka mphamvu zamakina apamwamba komanso machinability.

CVD SiC zokutira: CVD silicon carbide wosanjikiza, kuonetsetsa kuuma kwapadera, kukana dzimbiri, ndi chitetezo ku mibadwo ya tinthu. Ndipo Makhalidwe abwino kwambiri otengera kutentha kwa kutentha kwa yunifolomu kudera lonse la MOCVD susceptor system. Moyo wautali wautumiki pansi pa kupalasa njinga mobwerezabwereza (> 1200 ° C).

Mapulogalamu mu MOCVD

Chivundikiro cha satelayiti cha SiC chokutidwa ndi graphite ndi gawo lofunikira mu MOCVD epitaxy reactors, lopangidwa kuti liwonetsetse kukhazikika kokhazikika, kuwongolera kutentha, komanso kukonza kosawononga. Ntchito zake zimafalikira pamitundu yambiri yopangira semiconductor, kuphatikiza GaN, GaAs, InP, SiC, ndi zida zina za III-V.

1. Wafer Loading & Support

Chivundikiro cha satellite chimagwira ntchito ngati chonyamulira zowotcha panthawi yakukula kwa epitaxial. Maziko ake a graphite amapereka kukhazikika kwamakina, pomwe zokutira za SiC zimalepheretsa kukokoloka ndikuwonetsetsa kuti zosalala zimayikidwa. Kuphatikizikaku kumachepetsa chiopsezo cha kutsetsereka kwa wafer kapena kung'amba pang'ono pansi pa ntchito yotentha kwambiri.

2. Kuzungulira Kofanana kwa Ngakhale Kuyika

Mu MOCVD, zopyapyala zimazunguliridwa pa liwiro loyendetsedwa bwino kuti zikwaniritse kugawa gasi kofananira. Chophimba cha satellite chimatsimikizira kusinthasintha kosalala komanso kokhazikika, kuchepetsa kugwedezeka ndikusunga makulidwe a epitaxial wosanjikiza pamtunda wowongoka - chinthu chofunikira kwambiri pakupanga zokolola zambiri za LED, zida zamagetsi, ndi zida za RF.

3. Kuwongolera Kutentha & Kutumiza Kutentha

Kutentha kofanana ndikofunikira pamtundu wa kristalo. Kutentha kwapamwamba kwa zokutira za SiC kumatsimikizira kutentha kwachangu kuchokera ku susceptor kupita ku chowotcha, kuchepetsa kutentha kwa kutentha. Izi zimabweretsa zinthu zosanjikizana monga kukhazikika kwa doping, kuwongolera makristalo, komanso kupsinjika kwamakanema.

4. Kutetezedwa Kumagasi Opangira

Njira za MOCVD zimaphatikizapo mpweya woopsa monga NH₃ (ammonia), H₂ (hydrogen), ndi zitsulo-organic precursors. Wosanjikiza wa SiC amakhala ngati chotchinga cholimba cholimbana ndi kuukira kwa mankhwala, kuteteza kukokoloka kwa graphite, kutulutsa tinthu, komanso kuipitsidwa kwa chipinda cholumikizira.

5. Kuchepetsa Kuwonongeka kwa Tinthu ting'onoting'ono

Kuyipitsidwa kwa tinthu kumakhudza momwe chipangizocho chikuyendera komanso kuchuluka kwake. Kupaka kwa SiC kumapereka malo osalala, owundana, komanso olimba omwe amakana kuphulika ndi kupanga fumbi, kuonetsetsa kuti mafilimu oyeretsa a epitaxial ndi kudalirika kwapamwamba kwa chipangizo.

6. Moyo Wowonjezera Wautumiki Pakupalasa Kutentha Kwambiri

Kutentha ndi kuzizira mobwerezabwereza, graphite yosatsekedwa imawonongeka mofulumira. Kupaka kwa SiC kumathandizira kwambiri kukana kwa okosijeni ndi kulimba kwamakina, potero kumakulitsa nthawi ya ntchito, kuchepetsa nthawi yopuma, ndikuchepetsa mtengo waumwini wa nsalu ndi ma labu a R&D.

Ubwino wa Semixlab

Semixlab yadzipereka kuti ipereke mayankho owoneka bwino a graphite ndi SiC a zida za semiconductor epitaxy. Mphamvu zathu zikuphatikizapo:

● Kusintha mwamakonda anu - Mapangidwe opangidwa kuti agwirizane ndi mitundu yosiyanasiyana ya MOCVD reactor ndi zomwe makasitomala amafuna.

● Kufunsira kwaukadaulo - Zaka zopitilira 20 zaukadaulo wopanga ma semiconductor kuti athandizire kukhathamiritsa kwazinthu.

● Kulamulira Bwino Kwambiri - Chivundikiro chilichonse cha satellite chimayesedwa molondola, kutsimikizira makulidwe a zokutira, ndikuyesa kukhazikika kwa kutentha kwambiri.

● Utumiki Wodalirika Pambuyo pa Kugulitsa - Gulu lodzipereka lothandizira limatsimikizira kuyankha mwachangu komanso chitsogozo chopitilira makasitomala.

SiC yokutidwa ndi graphite satellite yopangidwa ndi Semixlab idapangidwa kuti ipereke kukhazikika kwamafuta, kukana dzimbiri, komanso ukhondo pamachitidwe a MOCVD. Pakuwonetsetsa kuti wafer pamwamba pabwino komanso kukulitsa nthawi yayitali ya zida, imapereka njira yotsika mtengo komanso yodalirika ya semiconductor epitaxy. Lumikizanani ndi Semixlab lero kuti musinthe makonda anu a SiC okutidwa ndi ma graphite ndikuwonjezera magwiridwe antchito anu a MOCVD.