Kuyeretsa Kotetezeka kwa AIXTRON Susceptor Popanda Kuwononga CVD SiC Coating

Malo otsukira omwe ali ndi CVD SiC ayenera kukhala oyera, koma ndi ofooka komanso owonongeka chifukwa cha njira zosagwira bwino ntchito. Nthawi zambiri zolakwika zazing'ono zomwe zimachitika poyeretsa zimapangitsa kuti pakhale kuuma kapena kukanda pang'ono komwe kumakhudza khalidwe la wafer pansi pa madzi. Mainjiniya wina wokonza zinthu ananena kuti kusintha kuchokera pa scrub pad yomwe anali kugwiritsa ntchito kupita ku chopukutira chofewa kumachepetsa mavuto omwe amabwera chifukwa cha kuwonongeka kwa utoto. Sikuti zotsalirazo zimachotsedwa zokha, komanso SiC wosanjikiza imasungidwa bwino kuti ipitirize kugwira ntchito yake yodzipatula kutentha kwa Sic yokutidwa ndi graphite susceptor .

Njira Zabwino Kwambiri Zotsukira Ma Susceptor a AIXTRON G5/G10 Kuti Muzigwira Ntchito Kwa Nthawi Yaitali

Njira yabwino kwambiri yoyeretsera ma susceptor a AIXTRON G5 ndi G10 si "kuyeretsa kwamphamvu", koma chotsukira ndi kuyeretsa ndikuchotsa pang'onopang'ono zinthu zomwe zasonkhanitsidwa kuti zisawononge chophimba cha CVD SiC. Mizere yambiri yopangira idzakhala ndi moyo wautali wa Epitaxial susceptor Ngati kuyeretsa ndi gawo la ndondomeko yonse osati sitepe yamphamvu. Njira imodzi yodziwika bwino yoyeretsera ndi kuyeretsa mpweya mkati mwa reactor. Izi zikutanthauza kuyeretsa zigawo za SiC kapena kaboni pogwiritsa ntchito mpweya wochokera ku halogen pa kutentha kolamulidwa. Chinsinsi cha kupambana ndi kutentha kolamulidwa, kuti muteteze chophimbacho kuti chisawonongeke. Mainjiniya ambiri amakonda njira iyi chifukwa sichikhudzana ndi (zomwe zimayambitsa kukanda pang'ono). Kuyeretsa konyowa kochepa pamene mukukonza kumagwiritsidwanso ntchito kwambiri. Kuli ndi kuyeretsa kosungunuka kuti muchotse zinthu zotayirira, kenako kumiza mosamala mankhwala oyeretsera kuti muchotse kuipitsidwa ndi zitsulo ndi ma oxides. Lamulo lofunika kukumbukira ndi lakuti 'palibe zida zotsukira, palibe kupukuta molakwika'. Ngakhale kukanda pang'ono pamwamba kumatha kugwira ntchito ngati chopangira tinthu panthawi ya kutentha kwambiri. Njira ina yomwe imagwiritsidwa ntchito ndi zinthu zina ndi kugwiritsa ntchito njira yoyeretsera. Kuyeretsa pang'ono pambuyo pa ntchito iliyonse kumachitika ndipo kuyeretsa kwakuya kwa mankhwala kumachitika pokhapokha panthawi yokonza yokhazikika, osati nthawi iliyonse. Izi zimachepetsa kupsinjika kwa chophimba cha SiC. Mzere umodzi wopanga SiC umanena kuti kulephera kwa utoto wa pulasitiki kunachepa chifukwa unasintha kuchoka pa kuyeretsa mwamphamvu kwa sabata iliyonse kupita ku njira zazifupi zotsukira tsiku ndi tsiku komanso kuyeretsa mwezi uliwonse kutengera zotsatira za kuwunika kowoneka bwino. Anthu ambiri sazindikira kufunika kolamulira njira yoziziritsira. Kuziziritsa pang'onopang'ono kwa susceptor musanatsuke ndikwabwino pochepetsa kutentha. Kusintha kwa kutentha kungakhale chifukwa cha kusweka kwa utoto, ngakhale kuti palibe zotsatira zomwe zingawonekere nthawi yomweyo. Ndipotu, nthawi zambiri moyo wautali wa susceptor umapezeka pophatikiza njira zitatuzi; kuyeretsa kolamulidwa mkati, kuyeretsa konyowa kochepa komanso kusamala bwino, kuti tipewe kulephera kulikonse koyambirira kwa susceptor (G5/G10) ndikuwonetsetsa kuti nthawi yayitali komanso phindu likhale labwino.

Kupewa Mavuto a Tinthu mu Epitaxy Panthawi Yotsuka Mankhwala

Tinthu tating'onoting'ono mwina ndi chimodzi mwa zinthu zofunika kwambiri pa njira yokhazikika ya epitaxy poyeretsa ndi njira za mankhwala. Filimu yonse yotsala kapena dothi lotayirira limatha pamwamba pa wafer ndikuyambitsa zolakwika zovuta kuzitsatira. Komabe, nthawi zambiri, ndi njira yoyeretsa yokha yomwe imabweretsa vutoli m'malo molithetsa. Vuto lodziwikiratu ndi kusambitsa mokwanira mutasamba ndi mankhwala. Mankhwala osatsukidwa kwathunthu kuchokera ku gawolo, panthawi yotenthetsera yotsatira amauma pa susceptor kapena pa chipindacho ndikukhala tinthu tating'onoting'ono. Kudontha madzi oyera kwambiri ndikulola kuti ziume bwino popanda kugwiritsa ntchito mpweya wokakamiza, zomwe zingafalikire kwambiri kungathandize kuchepetsa izi. Vuto lina ndi kuyeretsa pambuyo pake. M'zinthu zambiri, ziwalozo zimakhala zoyera ndipo zimasiyidwa kwa nthawi yayitali panja. Fumbi limatha kukhazikika pamwamba popanda kuwonedwa ndi aliyense - fumbi lokha kuchokera kuchipinda chotsukira. Katswiri wamakina otsukira akuti adachotsa nthawi yomweyo mavuto obwerezabwereza a tinthu pongogwiritsa ntchito chivundikiro cha thireyi yotumizira magawo, pogwiritsa ntchito mankhwala ofanana ndi omwe adagwiritsidwa ntchito kale. Kugwirizana kwa kuyeretsa ndi ziwalo ndikofunikiranso. Mankhwala amatha kuchita mosiyana ndi akale Kupaka kwa sic kapena zitsulo zomangira ndikupanga wosanjikiza woonda womwe ungadumphe pambuyo pake. Ichi ndichifukwa chake magulu ambiri akuyang'ana momwe kuyeretsa kumagwirira ntchito. Kulamulira gawo louma ndi chinthu china chomwe chinganyalanyazidwe. Madonthowa angachitike chifukwa cha madzi omwe atsala mu chuck yokha ndipo amatha kusiya madontho a mchere. Nthawi zambiri, gawo louma pang'onopang'ono, nthawi yayitali yozungulira ipereka mawonekedwe oyera. Chidule chake ndichakuti palibe cholakwika chimodzi chachikulu chomwe chimayambitsa mavuto a tinthu tating'onoting'ono. Ndi kuphatikiza kutsuka, kugwira ntchito ndi kuumitsa. Epitaxy imatha kukhala yokhazikika komanso yobwerezabwereza pochita njira zitatu zomwe zili pamwambapa bwino komanso mofatsa.

Kodi Graphite Yoyera Kwambiri Imayankha Bwanji Kutsuka kwa Asidi ndi Plasma?

Ndibwino kugwiritsa ntchito graphite yoyera kwambiri pamakina a epitaxy chifukwa cha kutentha kwambiri komwe kumagwiritsidwa ntchito komanso nthawi yayitali yogwiritsira ntchito. Komabe, pamwamba pa graphite pamasintha pang'ono pakapita nthawi mu njira zotsukira asidi/plasma zomwe sizingawonekere mosavuta: Ma graphite sasungunuka kapena kusungunuka mwachangu panthawi yotsuka asidi, koma zimachitika pamwamba. Ma asidi amphamvu amatha 'kuukira' pamwamba ndikupanga mabowo pamalo osalala poyamba. Malo ouma oterewa amatha kukhala malo oipitsa tinthu tating'onoting'ono kapena zotsalira zotsukira. Zimadziwika m'njira zambiri kuti, pakapita nthawi, zigawo zakale za graphite zimayamba kusonkhanitsa tinthu tambiri, pomwe njira yotsukira imakhalabe yofanana. Nthawi zambiri, izi zimachitika chifukwa cha kuwonekera kwa asidi kwa nthawi yayitali. Kutsuka kwa plasma kumakhala ndi zotsatira zofanana koma zosiyana zowononga. Mosiyana ndi kutsuka kwa asidi, kuchotsa zigawo za kaboni ndi mpweya ndi/kapena fluorine plasma ndikothandiza, koma pamwamba pake pamatha kuchotsedwa gawo ndi gawo. Kupukuta pang'onopang'ono pamwamba pa graphite kumabweretsa kusintha kwa kapangidwe, ndipo kungayambitse kuti zigawozo zikhale zofooka pamalo ena. Zikatero, ma flakes amatha kugwa pa kutentha kwambiri ndikugwira ntchito ngati magwero a tinthu mu reactor. Vutoli linapezeka pa mzere wopanga. Patatha miyezi ingapo, zigawo zatsopano zomwe zinatsukidwa mopitirira muyeso (ma plasma cycle angapo) zinayamba kupanga zolakwika mwachisawawa. Plasma inachotsedwa, komanso inagwira ntchito bwino kwambiri pochotsa kuipitsidwa. Kusintha nthawi yoyeretsera plasma, kuwonjezera kuchuluka kwa kuyang'ana kowoneka, kwachepetsa kuchuluka kwa chilema. Pofuna kupewa izi, ndikofunikira kuyang'anira nthawi yonse ya pamwamba pa graphite ndi mphamvu yoyeretsera. Kuyeretsa asidi sikuyenera kupitilira nthawi yayitali ndipo kuyenera kuchotsa kuipitsidwa kooneka kokha. Zawonedwa kuti ma pulse afupiafupi oyeretsera plasma amagwira ntchito bwino kuposa ma pulse aatali. Kuphatikiza apo, kusinthana kwa zigawo za graphite zomwe zimagwiritsidwa ntchito poyeretsera kumachepetsa kuwonongeka kwa graphite pang'ono. Chofunika kwambiri, graphite yoyera kwambiri imapangidwira kuti igwiritsidwenso ntchito, osati kusinthidwa nthawi zonse, ndipo monga momwe imagwiritsidwira ntchito tsiku ndi tsiku, kuyeretsa kulikonse kumachotsa tinthu ndikusintha pamwamba.

Zifukwa Zofala za Ming'alu ya CVD SiC Coating Pambuyo Pokonzanso Mobwerezabwereza

Zophimba za CVD SiC zimapangidwa kuti zikhale zolimba, koma kukonza kuyenera kuchitika mobwerezabwereza ndipo kungayambitse kupsinjika pakapita nthawi, zomwe zimapangitsa kuti pakhale ming'alu. Ming'alu nthawi zambiri imayamba chifukwa cha zolakwika zosiyanasiyana. Zimasonkhana pakapita nthawi ndi kusintha pang'ono pakugwira ntchito, kuyeretsa, komanso kutentha. Chifukwa chofala ndi kutentha chifukwa cha kayendedwe ka kuyeretsa. Ngati chopopera kapena gawo lophimbidwa litenthedwa kapena kuzizira mofulumira, gawo la SiC ndi zinthu zoyambira zidzakula pamlingo wosiyana. Kusagwirizana kumeneku kumabweretsa kupsinjika. Pambuyo pa kayendedwe kangapo, ming'alu yaying'ono imayamba kupanga, ndipo pambuyo pa kayendedwe kambiri, ming'alu imakula, mpaka pamapeto pake, palibe chomwe chimatsala. Gulu lokonza koyambirira linapeza kuti nthawi yayitali yozizira zisanachitike kuti zigawo zisunthidwe kumalo oyeretsera zimapangitsa kuti pakhale ming'alu yochepa. Nkhawa ina ndi kuwonekera kwa mankhwala nthawi zonse. Mgwirizano pakati pa chophimba cha SiC ndi substrate ukhoza kusweka pang'onopang'ono ndi ma acid amphamvu kapena njira zoyeretsera zogwira ntchito. Ngakhale kuti mtundu uliwonse wa kuyeretsa ungawoneke ngati wopanda vuto, kugwiritsa ntchito mobwerezabwereza kungayambitse kufooka kwa chophimba m'malo ena. Pakapita nthawi, malo ofooka amenewo amasanduka malo oyambira ming'alu. Kuwonongeka kwa makina ndi chinthu chachikulu. Zofooka zazing'ono pamwamba zimatha kuchitika chifukwa cha zochita zosavuta, monga ziwalo zopumulira pamalo olimba, kugwiritsa ntchito zida zachitsulo, kapena kukhudzidwa pang'ono pazigawo panthawi yosamutsa. Izi sizingakhale vuto poyamba koma kutentha kukakwera, zimakhala ming'alu yoonekera. Chifukwa china chobisika ndi kuyeretsa kwambiri kwa plasma. Plasma ingagwiritsidwe ntchito kuchotsa zotsalira, komanso ingayambitsenso kudulidwa kosafanana kwa pamwamba pa chophimba ngati patakhala nthawi yayitali kapena pafupipafupi. Izi zimapangitsa kuti pakhale kupsinjika m'mapangidwe ake, zomwe zimapangitsa kuti malo opsinjika afooke. Kusintha kwa gulu momwe adasungira mzere wopanga kunapangitsa kuti mavuto osweka achepe. Anachepetsa kuyika kwa mankhwala mwamphamvu, anayambitsa ma tray osagwira ntchito komanso kuchepetsa nthawi yoyeretsera plasma. Palibe kusintha komwe kunapangidwa pa chidacho, koma moonekeratu, moyo wa chophimbacho unawonjezeka. Lingaliro loyambira ndi losavuta: Zophimba za SiC sizilephera chifukwa cha kufooka kwawo, chifukwa kukonza mobwerezabwereza pang'onopang'ono kumawakakamiza kupitirira malire awo opsinjika. Ndikoyenera kutsatira sitepe iliyonse yoyeretsa pang'onopang'ono, kuti mukhale ndi moyo wautali wa chophimba komanso magwiridwe antchito okhazikika a epitaxy.

Kodi ndi liti pamene muyenera kukonza kapena kusintha magawo a Epitaxial mu AIXTRON Reactors?

Luso lokonza kapena kusintha ziwalo za epitaxial mkati mwa ma reactor a AIXTRON ndikukhala ndi luso lowerenga kusintha pang'ono ndikuzindikira zisanalephereke. Simudzapeza kuti zinthu zopangidwa bwino monga ma liners, ma susceptors ndi ma graphite sizigwira ntchito mwadzidzidzi. M'malo mwake ziwalo zimenezi zidzatha pang'onopang'ono pakapita nthawi ndipo panthawiyo, mavuto angayambe kuwonekera pa ma wafer anu. Chizindikiro chodziwikiratu cha mavuto obwerezabwereza ngakhale mutayeretsa, ndi ngati vuto lomwelo likupitirirabe. Ngati ma wafer anu akupitirizabe kusonyeza zolakwika zomwezo mwachisawawa ndipo ngakhale mutayeretsa, palibe chomwe chimasintha, mawonekedwe a pamwamba pa gawo lanu mwina sangakhale abwino kwambiri kuti muwakonzenso. Mwachitsanzo, mzere umodzi unapitiriza kuwonjezera mphamvu yoyeretsera kuti uthane ndi mavuto a tinthu tating'onoting'ono omwe anali kuwaona, koma chifukwa chakuti chotsukira chawo pansi pa chophimba cha SiC chinali ndi ming'alu yaying'ono. Kusintha kwa mtundu kapena kuwonongeka kwa chophimbacho ndi chizindikiro chodziwikiratu. Kawirikawiri ziwalo zophimbidwa ndi SiC zimawoneka chimodzimodzi nthawi zonse. Ngati muyamba kuona malo amdima omwe sangatsukidwe, kapena mawonekedwe osawoneka bwino/amitundu yosiyanasiyana pazigawo zina, ndiye kuti mwina utotowo wadyedwa kapena wawonongeka. Mwadikira nthawi yayitali kuti mukonze panthawiyi. Ming'alu ndi kusweka kwa m'mphepete zikusonyeza kuti kusintha ndiye njira yabwino kwambiri. Nthawi yotentha kwambiri imakonda kufalitsa ming'alu iyi mwachangu ngakhale itakhala yaying'ono poyamba. Kupukuta kapena kuyeretsanso ming'alu iyi nthawi zambiri kumachepetsa kukhazikika kwa ndondomekoyi, m'malo moikonza. Kusintha kwa ndondomeko yanu monga kusinthasintha kwa ndondomeko kungakhale chizindikiro chosavuta kuti kuwonongeka kwa ziwalo zayamba kukhala vuto. Pamene ziwalozo zikutha, mpweya kapena kufalikira kwa kutentha mkati mwa reactor kumasinthasintha ndipo mungayambe kuwona kusintha kwa kutentha, kuchuluka kwa malo osungiramo zinthu kapena kusinthasintha kwa wafer popanda njira yophikira kusinthidwa. Kawirikawiri kusintha kumeneku poyamba kumaonedwa ngati kusintha kwa njira osati vuto la makina lomwe gawo losweka limayimira. Kukonza ndikoyenera kwambiri pazochitika pomwe zodetsa zili mkati mwa khungu, monga kuipitsidwa pang'ono, kapena komwe kuwala kwayikidwa pazigawo zina. Muzochitika izi, kaya mankhwala oyeretsera, kapena plasma yamphamvu yochepa ingabwezeretse ziwalo mkati mwa malire, koma ngati pakhala kuwonongeka kulikonse kwa kapangidwe kake, kusintha gawo kudzakhala kodalirika kwambiri pakapita nthawi. Chinthu chabwino kwambiri chinali kufotokoza momwe achepetsera nthawi yawo yonse yopuma kuyambira pamene gawo lalephera kutsatira lamulo losavuta. Ngati awona vuto lomweli kawiri motsatizana atatsuka, gawolo limakokedwa ndikutumizidwa kuti likawonedwe, osati kuti ligwiritsidwe ntchito popanga. Zinapezeka kuti izi zinachepetsa nthawi yomwe kutsika kwadzidzidzi kwa zokolola kungachitike. Njira yabwino kwambiri yoyendetsera ntchito tsiku ndi tsiku idzakhala kukonza zida zosinthira mu kayendetsedwe ka ntchito, m'malo mokonza zinthu zomwe zikugwirizana ndi kukonza zinthu. Ndi kuyang'aniridwa mosamala, kutopa pang'ono kungapewedwe kuti ntchito yonse ichitike bwino mwa kusunga epitaxy yokhazikika komanso kupanga zisankho msanga.