CVD SiC Coated Graphite Susceptor ya MOCVD

Name: CVD SiC Coated Graphite Susceptor ya MOCVD
Brand: Semixlab
Price: 60.0 USD
Availability: InStock
Rating: 4.5 (19 reviews)

Monga gawo lofunikira kwambiri logwiritsidwa ntchito mu Metal-Organic Chemical Vapor Deposition (MOCVD) epitaxy, CVD SiC Coated Graphite Susceptor ya MOCVD Epitaxy idapangidwa kuti ikwaniritse zofunikira kwambiri pa kutentha, mankhwala, ndi makina a njira zokulira za semiconductor. Yopangidwa ndi graphite core yoyera kwambiri komanso silicon carbide (CVD SiC) yophimbidwa ndi nthunzi, susceptor iyi imapereka kutentha kofanana kwambiri, kukana bwino mpweya wowononga, komanso moyo wautali pansi pa kutentha kwambiri komwe kumachitika nthawi zambiri popanga epitaxial ya III-V ndi II-VI. Tikulandirani kufunsa kwanu.

Kufufuza

Kufotokozera

Mu makampani opanga ma compound-semiconductor masiku ano, zida za MOCVD zikukakamizidwa kwambiri kuposa kale lonse. Mphamvu zambiri, ma geometries olimba a zida, komanso zolinga zovuta kwambiri zimatanthauza kuti gawo lililonse logwiritsidwa ntchito liyenera kugwira ntchito moyembekezeredwa, mozungulira mozungulira. Pakati pa izi, graphite susceptor nthawi zambiri imanyalanyazidwa - koma mwina ndi gawo limodzi lomwe limapanga mwachindunji kufanana kwa kutentha kwa wafer, kusinthasintha kwa mawonekedwe a zigawo, komanso magwiridwe antchito onse.

Apa ndi pomwe Semixlab's coated susceptor imayambira. Timayamba ndi high-purity isostatic graphite, kenako timayika silicon carbide layer yolimba kudzera mu chemical nthunzi deposition. Zotsatira zake ndi gawo lomwe limapirira aggressive epi chemistryries, limapereka kutentha kodalirika, ndipo silitaya tinthu tating'onoting'ono - ngakhale titathamanga mazana ambiri. Ndi chisankho chotsimikizika cholima GaN, SiC, AlN, AlGaN, ndi zipangizo zina za III-V, kaya mukupanga zida zamagetsi, ma LED, kapena zigawo za RF.

Chifukwa Chake Wogwidwa Ndi Wofunika Kwambiri Kuposa Momwe Mungaganizire

M'machitidwe ake, chotsukira si chosungiramo wafer chokha. Chimakhudza kayendedwe ka mpweya, kutentha kwa mpweya m'thumba, komanso chiopsezo cha kuipitsidwa pakati pa magulu. Chophimba cha SiC chopangidwa bwino chimachita zinthu zitatu nthawi imodzi: chimatseka pamwamba pa graphite, chimaletsa kutuluka kwa mpweya, komanso chimateteza kuukira kwa ammonia, hydrogen, ndi halide precursors. Izi zikutanthauza kuti kuyeretsa kochepa sikuli bwino, kubwerezabwereza bwino kuyambira kuthamanga mpaka kuthamanga, ndipo - pamapeto pake - kufa kwabwino kwambiri pa wafer iliyonse.

Zinthu Zofunika Kwambiri Zomwe Tapanga Mu Chophimba

● Malo otentha omwe amakhala ofanana m'malo onse okhala ndi thumba, kuti musapeze malo otentha kapena m'mphepete mozizira.

● CVD SiC layer yomwe ndi yokhuthala kwambiri, yokhala ndi ma porosity pafupi ndi zero - zomwe zimapangitsa kuti chiwerengero cha tinthu timeneti chikhale chochepa.

● Kukana mankhwala komwe kumapirira maphikidwe ovuta kwambiri a MOCVD, kuphatikizapo omwe ali ndi kutentha kwambiri kwa NH₃ ndi H₂.

● Kukhazikika kwa makina komwe kumapulumuka kutentha ndi kuzizira mwachangu popanda kusweka kapena kusweka.

● Kulekerera kwa makina mpaka ma microns ochepa, ndi chithandizo chonse cha OEM cha mapangidwe a thumba, mapangidwe a mabowo, ndi mainchesi.

Kumene Ma Susceptor Athu Amagwiritsidwa Ntchito Kawirikawiri

● GaNbased LED epitaxy (yachizolowezi komanso yaying'ono)

● Kapangidwe ka zida zamagetsi za GaN (monga ma HEMT)

● SiC homoepitaxy ndi heteroepitaxy ya mphamvu ndi RF

● Kukula kwa AlN kwa zigawo za deepUV ndi piezoelectric

● Zosakaniza zina za IIIV - InGaN, AlGaN, ndi zina

Mwachidule: Zimene Mumapeza

mbali	Zimene Zikutanthauza kwa Inu
Gawo lapansi	Graphite yosasunthika, kuchuluka kwa phulusa < 5 ppm
❖ kuyanika	CVD silicon carbide, yopangidwa ndi kristalo yonse
Ntchito yamafuta	Yokhazikika mpaka 1400°C m'malo okhala ndi H₂/NH₃
dzimbiri kukaniza	Amapambana mayeso a NH₃ soak kwa maola 100 popanda kusintha kulemera
Moyo wonse	Kawirikawiri 3–5× yayitali kuposa njira zina zosapakidwa utoto kapena zopakidwa utoto
Custom options	M'mimba mwake, kuchuluka kwa thumba, mawonekedwe a m'mphepete, malo a mabowo - zonse malinga ndi chithunzi chanu

Chifukwa Chake Makasitomala Athu Amabwerera

Sitili nyumba yongopaka utoto chabe - ndife ogwirizana omwe amamvetsetsa epitaxy kuchokera mkati mpaka kunja. Gulu lathu lagwira ntchito pa reactor komanso mbali ya njira, kotero tikudziwa zomwe zili zofunika: kukhudzana ndi kutentha nthawi zonse, kuchepetsa kusuntha, komanso kutembenuka mwachangu mukafuna kubwerezabwereza kwa prototype. Kaya mukuyitanitsa zidutswa zisanu za mzere woyeserera kapena mazana asanu kuti apange voliyumu yambiri, timagwiritsa ntchito njira yowunikira yomweyi komanso kufunitsitsa komweko kuti tisinthe.

Mafunso Ofunsidwa Kawirikawiri - Mayankho Olunjika

Q1: Kodi "CVD SiCcoated graphite susceptor" kwenikweni imatanthauza chiyani?

Yankho: Ndi diski ya graphite yomwe yapatsidwa gawo lopyapyala, losalowa la silicon carbide pogwiritsa ntchito njira yochotsera nthunzi ya mankhwala. Chophimbacho chimatseka graphite yokhala ndi mapovu, kuti isatulutse tinthu tating'onoting'ono kapena kuchitapo kanthu ndi mpweya wopangidwa mkati mwa chipinda cha MOCVD.

Q2: N’chifukwa chiyani muyenera kuvutika ndi SiC m’malo mongogwiritsa ntchito graphite kapena pyrolytic coating?

A: SiC imapereka kuphatikiza kosowa - ndi yolimba, yosagwira ntchito ndi mankhwala, imapangitsa kutentha kukhala koyenera, ndipo ili ndi kuchuluka kwa kutentha komwe kumafanana ndi kwa graphite. Izi zikutanthauza kuti chophimbacho chimakhalabe cholimba panthawi yonse ya kutentha, mosiyana ndi zinthu zina zomwe zimasweka kapena kusweka.

Q3: Ndi zipangizo ziti za epitaxial zomwe mungagwiritse ntchito pa ma susceptors awa?

A: Taziwona zikugwiritsidwa ntchito bwino pa GaN, SiC, AlN, AlGaN, InGaN, komanso ma alloys ena a ternary ndi quaternary. Chophimbacho chimakhala chowonekera bwino ku chemistry, kotero sichimasokoneza doping kapena kapangidwe kake.

Q4: Kodi mungapange ma saizi osakhazikika kapena mapangidwe amitundu yambiri?

A: Inde. Nthawi zonse timapanga matumba athu - mainchesi, kuya, ndi malo osiyanasiyana - kutengera kukula kwa wafer yanu ndi kapangidwe ka reactor. Ingotitumizirani chithunzi mu mtundu wa DXF kapena STEP.

Q5: Kodi izi zimathandizira bwanji kuti ntchito ikule bwino?

Yankho: Njira zitatu - tinthu tating'onoting'ono tochepa timatanthauza kuti timatulutsa zipatso zambiri pa nthawi iliyonse; nthawi yayitali yophimba imatanthauza kuti zinthu sizisintha komanso nthawi yochepa yopuma; ndipo kutentha kokhazikika kumatanthauza kuti mutha kugwiritsanso ntchito njira yomweyi kwa miyezi ingapo popanda kukonzanso. Zimenezi zimapangitsa kuti pakhale kusintha kwakukulu kwa mtengo wa peawafer.