GaN / GaAs CVD SiC Coated Epitaxy Susceptor Carrier

Kapangidwe koyambira ndi kosavuta. Timagwiritsa ntchito graphite core yokhala ndi kuchuluka kwakukulu, isostatic ndipo timapanga β-SiC layer yokhuthala pamwamba kudzera mu CVD. Izi zimakupatsani mphamvu ya kutentha yomwe mukufuna kuchokera ku graphite, pomwe khungu la SiC limagwira ntchito ndi chemistry. NH₃, H₂, ndi zina zilizonse zomwe zimachitika - chophimbacho chimateteza zonsezi kutali ndi graphite yomwe ili pansi pake. Zotsatira zake ndi gawo lomwe limasunga GaN, GaAs, Micro-LED, RF, ndi zida zamagetsi zamagetsi.

N’chiyani chimawapangitsa kugwira ntchito m’dziko lenileni?

Ponena za kuyera: timasankha bwino zinthu zopangidwa ndi graphite. Ma grade a isostatic omwe timagwiritsa ntchito amayamba ndi ukhondo, ndipo CVD SiC coating imakhala yolimba kwambiri. Kuipitsidwa kwa chitsulo kumakhala kochepa kotero simuyenera kuda nkhawa kuti chingawononge chipinda cha epitaxy choyera kwambiri.

Kachitidwe ka kutentha kali ndi kofunikanso. Timayesetsa kufananiza mawonekedwe a kutentha kotero kuti wafer ione kutentha kofanana pamwamba pake. Imayenda nthawi yayitali kutentha kwambiri, kutentha mwachangu komanso kuzizira - chotenthetsera chimakhala chokhazikika pamlingo wonse. Kusasinthasintha kumeneko kumawonekera mu kufanana kwa makulidwe ndi kuwongolera kapangidwe kake pambuyo pa kuthamanga.

Kuukira kwa mankhwala mwina ndiye vuto lalikulu mu GaN MOCVD. Ngati mudawonapo gawo lopanda kanthu la graphite likuwonongeka pambuyo pa maulendo angapo, mukudziwa zomwe ndikutanthauza. Chophimba cha SiC chimasintha mphamvuyo. Chimalimbana bwino ndi mpweya wa processing, ndipo chifukwa sichitaya zinthu zikamakalamba, mumapeza tinthu tating'onoting'ono toyandama mozungulira chipindacho. Chipinda choyera, zokolola zabwino - ndi cholunjika.

Mwaukadaulo, chophimbacho chimamatira. Tagwira ntchito yambiri yolumikiza, kotero simumatupa kapena kung'ambika ngakhale gawolo litawona kutentha. Kapangidwe ka CVD kolimba kamathandizanso pa izi. Ogwiritsa ntchito nthawi zambiri amawona nthawi yayitali kuposa momwe amapezera kuchokera ku graphite yosaphimbidwa, zomwe zikutanthauza kuti nthawi yochepa yoyeretsa chipinda ndi kusintha magawo.

Kodi nthawi zambiri mumazipeza kuti?

GaN MOCVD ndi HVPE — ma LED, zida zamagetsi, ma RF chips, ma Micro-LED. Kutentha kwa ndondomeko kumakhala pakati pa 1000 °C ndi 1100 °C, komwe kuli koyenera kwambiri pa dongosololi.

GaAs MOCVD — Ma VCSEL, ma laser olumikizirana, masensa a infrared, magawo a RF. Zofunikira zofanana za kutentha, chemistry yosiyana pang'ono, kufunikira komweko kwa chonyamulira choyera komanso chokhazikika.

Zipangizo za semiconductor zotentha kwambiri — kupatula ma reactor a epitaxy okha, zimapezeka m'magulu onyamula ma wafer ndi zigawo za thermal zone komwe ukhondo ndi kukhazikika kwa kutentha ndizofunikira.

Momwe timasungira khalidwe logwirizana

Mukhoza kukhala ndi graphite yabwino kwambiri komanso mankhwala abwino kwambiri ophikira, koma ngati njirayi sinayikidwe, gawolo siligwira ntchito bwino. Timasankha magiredi a graphite kutengera kutentha, kuchulukana, komanso kukhazikika kwa nthawi yayitali. Kenako sitepe ya CVD imasinthidwa kuti igwirizane ndi kapangidwe kalikonse - makamaka kofunikira kwa ma susceptor akuluakulu kapena chilichonse chomwe chili ndi mawonekedwe ovuta. Cholinga chake ndi kuphimba kofanana komanso kumamatira mwamphamvu, palibe mawanga owonda kapena m'mbali zofooka.

Gulu lililonse limadutsa m'malo angapo owunikira: makulidwe a chophimba, kukhwima kwa pamwamba, kukula kofunikira, kuyera, ndi kukhazikika kwa chophimba chonse. Sizokongola, koma ndi zomwe zimapangitsa kuti tinthu tichepetse kuwerengera ndikukulolani kuti mubwerezenso njira yanu popanda zodabwitsa zoyipa.

Bwanji mugwiritse ntchito SiC coating m'malo mwa bare graphite?

Mwachidule: graphite yopanda kanthu imadyedwa. Graphite yokhala ndi SiC-coated siidyedwa. Mwachidule, mumapeza:

● Kukana bwino mpweya wowononga

● Kupanga tinthu tating'onoting'ono kochepa kwambiri pakapita nthawi

● Moyo wothandiza nthawi yayitali musanasinthe

● Mikhalidwe yokhazikika kwambiri ya ndondomeko

● Zipatso zambiri komanso zokhazikika za wafer

Ndi kuphatikiza komwe kumveka bwino — graphite imasuntha kutentha, SiC imatenga kugwiritsa ntchito mankhwala molakwika. Mu compound semiconductor epitaxy, imeneyo yakhala yankho lofunika kwambiri pazifukwa zina.

Zosintha

Sitimamanga gawo lomwelo kawiri. Zambiri zomwe timatumiza zimapangidwa kuti zigwirizane ndi zojambula za kasitomala kapena kusinthidwa ku mtundu winawake wa reactor. Tikhoza kusintha:

● Kukula kwa chidebe cha mkate ndi kapangidwe ka thumba

● Chiwerengero ndi kapangidwe ka matumba

● Mapangidwe a mabowo ndi mabowo odutsa

● Kunenepa konse

● Zofunikira pakumaliza pamwamba

Zitsanzo ndi kuchuluka kwa zinthu zonse ziwiri zili bwino — tidzagwira nanu ntchito kaya mukufuna zida zingapo zoyesera kapena kutumiza nthawi zonse.

MAFUNSO OFUNSIDWA KAWIRIKAWIRI

Kodi kwenikweni susceptor yokhala ndi SiC imagwira ntchito bwanji?

Imasunga ma wafers panthawi yomwe epitaxial ikukula, imafalitsa kutentha mofanana pamwamba pa wafer, ndipo imagwiritsa ntchito SiC layer kuteteza graphite ku mpweya wowononga.

Bwanji osagwiritsa ntchito graphite yosaphimbidwa?

Graphite yosaphimbidwa imawonongeka mofulumira kwambiri mu mpweya monga ammonia yotentha ndi haidrojeni. Zimenezi zimapanga tinthu tating'onoting'ono, zimafupikitsa nthawi ya moyo, komanso zimawononga zokolola. Chophimba cha SiC chimathetsa mavuto onse atatuwa.

Kodi mungapange izi kuti zigwiritsidwe ntchito pa ma reactor osiyanasiyana?

Inde. Timasintha miyeso, mapangidwe a m'thumba, ndi mapangidwe a mabowo kuti agwirizane ndi chida chilichonse cha MOCVD kapena HVPE chomwe mukuchigwiritsa ntchito.

Kodi ndi njira ziti zomwe zingagwiritsidwe ntchito?

GaN LED, mphamvu, ndi RF epi; Micro-LED; VCSEL ndi GaAs epitaxy — kulikonse komwe mukufuna chonyamulira choyera komanso chokhazikika pa kutentha kwambiri.