SiC Coated Epi susceptor

Choteteza cha epitaxial chokhala ndi SiC ndi gawo lofunikira kwambiri mu njira za semiconductor epitaxy (EPI), komwe kuwongolera kutentha kolondola, kukhazikika kwa mankhwala, komanso kuipitsidwa kochepa kwambiri ndikofunikira kuti pakhale zigawo zapamwamba za epitaxial.

Mu epitaxial reactor, susceptor imathandizira mwachindunji wafer ndipo imazindikira momwe kutentha ndi mankhwala zimakhalira panthawi ya kukula kwa kristalo. Mosiyana ndi ma passive chamber liners, epitaxial susceptors zimakhudza kwambiri kutentha, kukula kwa kinetics, ndi kugawa kwa dopant. Mwa kuphatikiza graphite substrate yoyera kwambiri ndi CVD silicon carbide yokhuthala, Silicon Carbide Coated Epi susceptor imapereka kukhazikika kwa nthawi yayitali pansi pa zochitika zovuta kwambiri.

Ntchito Zazikulu ndi Maudindo mu Njira za Epitaxial

1. Thandizo la Wafer ndi Kusamalira Kutentha Koyenera

Pa nthawi ya kukula kwa epitaxial, ma wafer amakumana ndi kutentha komwe kumapitirira 1000°C mpaka 1600°C. SiC Coated Epi susceptor imapereka nsanja yokhazikika yamakina yokhala ndi kutentha kwabwino kwambiri, kuonetsetsa kuti kutentha kumasamutsidwa bwino komanso mofanana kupita ku wafer. Silicon Carbide Coating imasunga mawonekedwe ofanana pamwamba kwa nthawi yayitali, kuthandizira kufalikira kwa kutentha kofanana pamwamba pa wafer ndikuchepetsa kutentha kwapakati komwe kungayambitse kusinthasintha kwa makulidwe ndi kukana.

2. Kupatula Mankhwala ndi Kuletsa Kuipitsidwa

Njira za Epitaxial nthawi zambiri zimachitika m'mlengalenga wa hydrogen woyera kwambiri pogwiritsa ntchito zinthu zoyambira monga silane, chlorosilane, ndi mpweya wokhala ndi kaboni. Pansi pa izi, zinthu zosatetezedwa za graphite zimakhala pachiwopsezo cha kudulidwa kwa mankhwala, kusweka, komanso kupanga tinthu tating'onoting'ono. Chophimba cha silicon carbide cha CVD chokhala ndi kuchuluka kwakukulu chimagwira ntchito ngati chotchinga champhamvu chofalitsa, chomwe chimalekanitsa bwino pakati pa graphite ndi mpweya wowononga ndikuletsa kutulutsidwa kwa zinthu zodetsa zokhudzana ndi chitsulo kapena kaboni.

3. Chiyanjano Chokhazikika cha Kukula ndi Kubwerezabwereza kwa Njira

Makhalidwe a pamwamba pa susceptor amachita gawo lofunika kwambiri pakupanga kayendedwe ka mpweya, momwe mpweya umayendera, komanso kutentha komwe kumadutsa mkati mwa chipinda cha epitaxial. Semixlab's Silicon Carbide Coated Epi susceptor ili ndi mawonekedwe olamulidwa a pamwamba komanso kutulutsa mpweya kosalekeza, zomwe zimathandiza kusunga mikhalidwe yokhazikika pakuyenda kulikonse. Kukhazikika kumeneku kumathandizira kukula kwa epitaxial mobwerezabwereza, kuphatikiza kwa dopant kofanana, komanso kufananiza kwa wafer ndi chipangizo ndi chipangizo m'mizere yopangira yambiri.

4. Kukana Kutentha kwa Njinga ndi Moyo Wowonjezera wa Utumiki

Zipangizo za Epitaxial zimayendetsedwa ndi kutentha pafupipafupi komanso zimatsukidwa mwamphamvu mkati mwa malo. Kugwirizana kwa kutentha pakati pa chophimba cha SiC ndi graphite substrate kumachepetsa kupsinjika kwa makina panthawi yotenthetsera ndi kuzizira, kuchepetsa chiopsezo cha kusweka kapena kusweka. Poyerekeza ndi zinthu zosaphimbidwa kapena zophimbidwa ndi PVD, kapangidwe kake ka CVD SiC kamapereka kulimba kwapamwamba, kukulitsa nthawi yosamalira komanso kuchepetsa mtengo wonse wa umwini popanda kusokoneza magwiridwe antchito a ntchito.

Chotsukira chilichonse cha Silicon Carbide Coated Epi chochokera ku Semixlab chimapangidwa motsatira njira zowongolera zovuta kwambiri, zomwe zimagogomezera kuyera kwa chophimba, kufanana kwa makulidwe, ndi mphamvu yomatira. Monga kampani yotsogola yaukadaulo mu gawo la njira za semiconductor epitaxial ku China, Semixlab ikudziperekabe kupereka ukadaulo wapamwamba komanso njira zosinthira za SiC Coated Epi susceptor zomwe zasinthidwa kuti zigwiritsidwe ntchito ndi makampani opanga semiconductor. Semixlab ikuyembekezera mwachidwi kukhala mnzanu wa nthawi yayitali ku China.