Chifukwa Chake Mapepala Othandizira a TaC Okhala ndi Ma Pedestal Amapereka Kulimba Kwambiri kwa Plasma mu Njira Zamphamvu Kwambiri

Mu njira zamagetsi zamagetsi zambiri, ziwalo zomwe zili mkati mwa chipindacho zimakhala ndi mikhalidwe yovuta kwambiri. Mapepala othandizira oyenda pansi amasunga ma wafers pamalo awo, kotero akatha msanga amatha kuyambitsa zotsatira zosafanana, kuipitsidwa, komanso nthawi yokwera mtengo yogwira ntchito. Mapepala othandizira oyenda pansi okhala ndi TaC amathandizira kuthetsa vutoli. Malo awo olimba komanso osagwira ntchito ndi mankhwala amakhala nthawi yayitali m'malo ovuta a plasma kuposa zida wamba. Kudziwa momwe zokutirazi zimagwirira ntchito kumathandiza mainjiniya ndi akatswiri kuti makina awo azigwira ntchito bwino komanso modalirika.

Momwe Kuphimba kwa TaC Kumathandizira Kukhazikika kwa Kutentha ndi Plasma

Mapepala othandizira oyenda pansi omwe amagwiritsidwa ntchito m'zipinda za plasma amagwira ntchito m'malo ovuta kwambiri komwe amakhudzidwa ndi ma ayoni amphamvu kwambiri, omwe amakumana ndi mpweya woipa, komanso amatenthedwa kutentha kwambiri kwa nthawi yayitali. Pakapita nthawi, zinthu zovutazi zimatha kuwononga mapepala opangidwa kuchokera ku zipangizo wamba, zomwe zimapangitsa kuti ziwonongeke, ming'alu, komanso kuwonongeka kwa pamwamba komwe kumakhudza kukonza ma wafer ndikuwonjezera nthawi yogwira ntchito. Kupaka kwa TaC Zimathandizira kwambiri kulimba kwa mbale izi popanga malo olimba komanso osatentha omwe amateteza maziko. Ubwino umodzi waukulu wa TaC ndi kukhazikika kwake kwabwino kwambiri pa kutentha, komwe kumalola mbaleyo kuthana ndi kutentha ndi kuzizira mwachangu popanda kupindika kapena kusweka. Kukhazikika kumeneku ndikofunikira kwambiri chifukwa ngakhale kusintha pang'ono kwa mawonekedwe kumatha kukhudza kulinganiza kwa wafer, kufanana kwa processing, ndi mtundu wonse wa malonda. TaC imaperekanso kukana kwamphamvu motsutsana ndi kuukira kwa plasma. Ma ion osinthika ndi ma radicals omwe nthawi zambiri amadya malo osatetezedwa amatsekedwa ndi TaC layer, zomwe zimathandiza kupewa kukokoloka kwa nthaka ndikuchepetsa kupanga tinthu tomwe tingadetse ma wafer. Chifukwa cha chitetezo ichi, mbale zophimbidwa ndi TaC zimafunikira kutsukidwa ndi kusinthidwa pafupipafupi, kusunga nthawi ndi ndalama zogwirira ntchito. M'malo enieni opangira ma semiconductor, mbale zophimbidwa izi zawonetsa moyo wautali wautumiki komanso magwiridwe antchito okhazikika ngakhale pansi pa mphamvu zambiri komanso machitidwe amphamvu. Ponseponse, mbale zothandizira za TaC zophimbidwa ndi pedestal zimathandiza kusunga kukonza kokhazikika, kuchepetsa zosowa zosamalira, ndikuthandizira kupanga kosalala komanso kodalirika m'makina amphamvu kwambiri a plasma.

Kugwiritsa Ntchito Kofunika Kwambiri kwa Mapangidwe Ophimbidwa ndi TaC mu Zipinda Zopangira ndi Zosungiramo Zinthu

Mapangidwe okhala ndi TaC monga ma pedestal support plates, ma liners, ndi zishango ndizofunikira kwambiri m'zipinda zomata komanso zosungiramo zinthu chifukwa malo awa ndi ovuta kwambiri. Zigawo zimakumana ndi plasma yamphamvu, kutentha kwambiri, ndi mpweya wochitapo kanthu womwe ungawononge mwachangu zitsulo zosatetezedwa kapena zigawo za ceramic. Zigawo zikatha, zimatha kupanga tinthu tating'onoting'ono, kutentha kosagwirizana, kapena kutaya kukhazikika, zomwe zonse zimachepetsa ubwino wa wafer komanso kupanga pang'onopang'ono. M'zipinda zomata, ma TaC okhala ndi TaC amathandiza kusunga plasma yofanana polimbana ndi kuphulika kwa ma ion komwe nthawi zambiri kumawononga pamwamba. Izi zimathandiza kupewa mapangidwe a tinthu tating'onoting'ono ndi kugawa mphamvu kosagwirizana, komwe ndikofunikira kwambiri pakupanga bwino kwa nanoscale. Zotsatira zake, ma wafer amadulidwa mofanana ndipo kukonza kumatha kuchitika kawirikawiri. M'zipinda zomata zomwe zimagwiritsidwa ntchito pazinthu monga CVD kapena ALD, Zovala za TaC kuteteza mbale ku kuukira kwa mankhwala ndi kuwonongeka kwa kutentha. Izi zimathandiza mbale kukhala zokhazikika nthawi yayitali komanso kusintha kwa kutentha mwachangu, zomwe zimathandiza kuti mafilimu opyapyala akule mofanana pa wafer. Ma fabs ambiri amanena kuti zigawo zophimbidwa ndi TaC zimakhala nthawi yayitali, zimafuna kusintha kochepa, komanso zimakhala zoyera panthawi yogwira ntchito. Ponseponse, kuphatikiza kwa kukhazikika kwa kutentha, kukana kwa plasma, ndi kulimba kwa mankhwala kumapangitsa zigawo zophimbidwa ndi TaC kukhala chisankho chodalirika chosungira njira zokhazikika, kuchepetsa nthawi yogwira ntchito, komanso kuthandizira kupanga wafer wabwino kwambiri nthawi zonse.