Kodi N'chiyani Chimachititsa Kuti SiC Ceramic Membrane Ikhale Yabwino Kwambiri Poyeretsa Kwambiri ndi Kukana Mankhwala Pakupanga Semiconductor?

Mu kupanga ma semiconductor, ngakhale tinthu tating'onoting'ono kwambiri kapena kusayera kwa mankhwala kumatha kuwononga gulu la ma wafers zomwe zimapangitsa kuti zinthu zichedwe komanso ziwonongeke. Ichi ndichifukwa chake kusefa kumachita gawo lofunika kwambiri pakusunga njira zoyera kwambiri. Silicon carbide (SiC) ceramic membranes yakhala chisankho chokondedwa m'malo ovuta awa. Amapereka kuphatikiza kwapadera kwa kulimba ndi kukana kwa mankhwala komwe zinthu zina zambiri sizingafanane nako. Kuyambira kugwira ntchito ndi ma acid amphamvu mpaka kupulumuka kutentha kwambiri, Solid SiC Sungani madzi oyera komanso makina odalirika. Kumvetsetsa chifukwa chake ma nembanemba amenewa amagwira ntchito bwino kungathandize mainjiniya ndi akatswiri kupanga zisankho zabwino zosungira mphamvu ndi nthawi yayitali ya zida.

Kodi Kapangidwe ka Membrane ya SiC kamathandizira bwanji kutentha kwambiri komanso kukhazikika kwa mankhwala?

Ma membrane a ceramic a Silicon carbide (SiC) amapangidwa kuti azigwira ntchito zomwe zingawononge zinthu zina zambiri zosefera mwachangu. Chinsinsi chili m'mapangidwe awo. SiC imapangidwa kuchokera ku netiweki ya ma covalent bonds amphamvu omwe amaupatsa kuuma kwambiri komanso kukhazikika. Kapangidwe kameneka kamalola nembanemba kuti isasweke kapena kupindika ngakhale kutentha kwambiri, zomwe zimapangitsa kuti ikhale yoyenera kuchita zinthu monga kuyika nthunzi ya mankhwala kapena kunyowa komwe madzi amatha kufika madigiri Celsius ambiri. Ma pores omwe ali mu nembanemba za SiC ndi ofanana kwambiri ndipo amawongoleredwa bwino. Kufanana kumeneku kumathandiza kusunga kuchuluka kwa madzi oyenda bwino komanso kuteteza tinthu tating'onoting'ono ngakhale titapanikizika kwambiri. Chifukwa chakuti zinthuzo sizimatupa, sizisungunuka kapena kuchita ndi mankhwala amphamvu, zimatha kusefa ma acid, maziko, ndi zosungunulira zachilengedwe popanda kuwonongeka. Poyerekeza, nembanemba za polima nthawi zambiri zimalephera pansi pa mikhalidwe yomweyi kaya mwa kuswa kapena kutulutsa zinthu zodetsa m'madzi. Nembanemba za SiC zimapindulanso ndi kutentha kwawo. Kutentha kumagawidwa mofanana pa nembanembayo kuti kupewe malo otentha omwe angafooketse zinthuzo kapena kuyambitsa kuipitsidwa. Mwachizolowezi izi zikutanthauza kuti nthawi yayitali yogwira ntchito komanso kusokonezeka kochepa pakuyeretsa kapena kusintha. Mwachitsanzo, mu semiconductor fab yogwira nitric acid yamphamvu, a Solid SiC imatha kusefa yankho mosalekeza kwa miyezi ingapo pomwe fyuluta ya polima yachikhalidwe ingafunike kusinthidwa masiku angapo aliwonse. Ubwino wina ndi mphamvu ya makina. Ngakhale pansi pa kuchuluka kwa madzi kapena kupanikizika kwakukulu, ma nembanemba a SiC amasunga mawonekedwe awo ndi magwiridwe antchito awo. Kukhazikika kumeneku kumatsimikizira kuti kusefa sikutsika pakapita nthawi ndipo ma wafer amatetezedwa ku tinthu tating'onoting'ono tomwe tingakhudze zokolola. Mwa kuphatikiza kukana mankhwala, kukhazikika kwa kutentha kwambiri komanso kulimba kwa makina, ma nembanemba a SiC amapereka kusefa kodalirika m'malo ena ovuta kwambiri opangira ma semiconductor.

Chifukwa chiyani ma nembanemba a SiC ndi ofunikira kwambiri pa ntchito zoyeretsera za UPW, CMP, ndi Chemical?

Mu kupanga ma semiconductor, slurry zamadzi oyera bwino (UPW) chemical mechanical polishing (CMP) ndi njira zamphamvu zamankhwala ndizofunikira kwambiri pa gawo lililonse la ndondomekoyi. Zoipitsa, ngakhale pa sikelo ya nanometer zimatha kuyambitsa zolakwika pa ma wafer, kuchepetsa zokolola ndi ubwino wa zinthu. Apa ndi pomwe ma membrane a SiC ceramic amatsimikizira kufunika kwawo. Kapangidwe kake kolondola ka ma pore ndi kukhazikika kwa mankhwala zimapangitsa kuti zikhale zabwino kusefa tinthu tating'onoting'ono ndi ma ion osafunikira popanda kuyambitsa zoipitsa zatsopano. Kwa machitidwe a UPW, kusunga tinthu tating'onoting'ono kwambiri ndi chitsulo ndikofunikira kwambiri. Ma membrane a SiC amatha kuthana ndi kutentha kwambiri ndikukana dzimbiri, zomwe zimawalola kuchotsa tinthu tating'onoting'ono ta sub-micron bwino. Mosiyana ndi ma membrane a polima, satulutsa zinthu zachilengedwe kapena kuwonongeka pakapita nthawi, kuthandiza ma fabs kusunga ukhondo wa madzi nthawi yayitali yogwira ntchito. Izi zimachepetsa nthawi yopuma ndikuchepetsa chiopsezo cha kutayika kwa zokolola chifukwa cha madzi oipitsidwa. Mu CMP slurry filtration tinthu kuwongolera ndikofunikira. Ma membrane a SiC amatha kusefa tinthu tating'onoting'ono tomwe timatha kusefa tinthu tating'onoting'ono tomwe timayamwa madzi mosalekeza. Kulimba kwawo kumatsimikizira kufalikira kwa tinthu tating'onoting'ono tomwe timagawa, zomwe zimakhudza mwachindunji kufanana kwa kupukuta ndi mtundu wa pamwamba pa wafer. Kukhazikika kumeneku kumatanthauzanso kuti kusintha kwa fyuluta pafupipafupi sikumapulumutsa nthawi komanso ndalama zogwirira ntchito. Kusefa kwa mankhwala, monga ma acid ndi zosungunulira zomwe zimagwiritsidwa ntchito pocheka kapena kuyeretsa kumapindula ndi zinthu zomwezo. Ma nembanemba a SiC amalimbana ndi mankhwala oopsa omwe angawononge ma fyuluta ambiri a polima omwe amalola kugwira ntchito mosalekeza popanda kusokoneza magwiridwe antchito osefa. Ma wafer ndi zida zimatetezedwa ku tinthu tating'onoting'ono ndi zotsalira za mankhwala, zomwe zimapangitsa kuti ntchito yonse ikhale yodalirika. Mwa kuphatikiza kukana kwambiri mankhwala, kukhazikika kwa kutentha, komanso kusefa kolondola kwa tinthu tating'onoting'ono, Solid SiC Zimapereka magwiridwe antchito okhazikika pa ntchito zonse za UPW, CMP, ndi kusefa kwa mankhwala. Sikuti zimangoteteza ma wafers ku kuipitsidwa komanso zimathandizanso kuti zinthu za semiconductor zizikhala bwino, zimachepetsa kukonza, komanso zimawonjezera nthawi ya zida zofunika kwambiri zokonzera.