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TaC Coated Pedestal Support Plate
Monga otsogola ku China opanga komanso ogulitsa ma Plates othandizira a TaC Coated Pedestal, Semixlab TaC Coated Pedestal Support Plate idapangidwa kuti ipereke magwiridwe antchito apamwamba kwambiri pamapangidwe apamwamba a semiconductor monga CVD, epitaxy, ndi plasma etching system. Zopangidwira kutenthedwa kwambiri komanso zachilengedwe, zimapereka nsanja yokhazikika komanso yofananira yomwe imapangitsa kuti mawonekedwe azing'onoting'ono, mawonekedwe apangidwe, komanso kuberekana. Takulandilani kufunsa kwanu.
Kufotokozera
Ku Semixlab Technology, timazindikira kuti mbale yothandizira pansi imakhala ngati imodzi mwazinthu zofunikira kwambiri zamapangidwe komanso kutentha mkati mwa zipinda zapamwamba za semiconductor process. M'malo otentha kwambiri monga epitaxy, CVD, ndi plasma etching system, chopondapo sichimangothandizira chowotcha kapena chowotchera pamakina, komanso chimakhala ndi gawo lofunikira pakuwonetsetsa kuti kutentha kumafanana, kukhazikika kwamankhwala, komanso kubwerezabwereza nthawi iliyonse yopanga.
Wopangidwa ndi zida za graphite zoyera kwambiri komanso zokutidwa ndi zigawo zapamwamba zogwirira ntchito monga Tantalum Carbide (TaC), mbale yothandizira pedestal imagwira ntchito ngati mawonekedwe otenthetsera pakati pa gawo lotenthetsera ndi chowotcha. Kukonzekera kumeneku kumathandizira kufalikira kwa kutentha kofanana pamtunda wonse wowotcha - chinthu chofunikira kwambiri kuti tikwaniritse kukula kwa filimu kosasinthasintha, mbiri ya dopant yoyendetsedwa, komanso kachulukidwe kakang'ono ka epitaxial kapena deposition process. Kutentha kwapamwamba kwa kapangidwe ka maziko, kuphatikizidwa ndi kusakhazikika kwamphamvu kwamankhwala kwa zokutira za TaC, kumawonetsetsa kuti nsanja imakhalabe yokhazikika komanso yosachita dzimbiri ngakhale pakukwera njinga mobwerezabwereza pa kutentha kopitilira 1200 ° C.
Kupitilira kuwongolera kutentha, mbale yothandizira pedestal imagwiranso ntchito ngati chinthu chofunikira kwambiri chowongolera kuipitsidwa. Pa ntchito ya plasma etching ndi CVD, malo okhala m'chipindacho nthawi zambiri amakhala ndi mpweya wokhazikika monga chlorine, fluorine, kapena silane. Mitundu imeneyi imatha kuwononga malo osatetezedwa, kupanga zinthu zosafunikira kapena tinthu tating'onoting'ono tomwe timasokoneza kukolola kwa mkate. Mwa kuphatikiza zokutira zolimba komanso zofananira za TaC, njira yoyambira ya Semixlab imalepheretsa kuwonongeka kwa zinthu ndi kukhetsedwa kwa tinthu, potero kumasunga mawonekedwe oyera ndikukulitsa moyo wonse wautumiki wa hardware.
Kuphatikiza apo, kupendekeka kolondola komanso kusasinthika kwa mbale zothandizira zimatsimikizira malo okhazikika opindika komanso malo ofanana - zinthu zomwe zimakhudza mwachindunji kusuntha kwa mpweya, kugawa kwa plasma, ndi kuchuluka kwa kutentha. Ukadaulo wapamwamba kwambiri wa Semixlab womaliza komanso wokutira wofananira umalola kuti chopondapo chizisunga mapulani ang'onoang'ono komanso kuuma kwapamtunda pansi pa Ra 0.2 μm, kuchepetsa bwino zolakwika zazing'ono komanso zosafanana zamakanema panthawi yopanga mwatsatanetsatane.
M'malo mwake, mbale yothandizira zitsulo sizongotengera makina chabe - ndizomwe zimawathandiza kuti azitha kugwira ntchito komanso kudalirika. Kupyolera mu kapangidwe kawo kawongoleredwe ka kutentha, ukadaulo wapamwamba kwambiri wokutira, komanso kusankha zinthu molimba mtima, Semixlab Technology imapereka misonkhano yoyambira yomwe imathandizira ma semiconductor opanga ma semiconductor am'badwo wotsatira, kuchokera ku zida za bandgap zazikulu monga SiC ndi GaN kupita ku mapulogalamu apamwamba a silicon epitaxy.
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