Mutu wa Showerhead Wokutidwa ndi Graphite wa CVD SiC

Mutu wa shawa wa CVD SiC wokhala ndi graphite ndi gawo logawa mpweya lomwe limagwiritsidwa ntchito popanga ma semiconductor epitaxy ndi ma wafer apamwamba. Umayamba ndi graphite core yoyera kwambiri, kenako umapeza utoto wokhuthala wa CVD silicon carbide. Ntchito ya mutu wa shawa ndi yosavuta koma yofunika kwambiri: kupereka mpweya mofanana pamwamba pa wafer, uku ukupirira kutentha kwambiri komanso mankhwala amphamvu.

Mkati mwa chipinda chochitirapo kanthu, chimagwira ntchito ngati chotulutsira mpweya molondola. Mpweya wopangira umadutsa m'njira zamkati ndi mawonekedwe a mabowo ang'onoang'ono otulukira, kotero mpweya umafalikira mofanana pa wafer. Kufanana kumeneko kumakhudza mwachindunji kulimba kwa filimu, mtundu wa kristalo, komanso momwe njira yanu imabwerezedwanso.

Semixlab imapanga mitu ya shawa yokhala ndi CVD SiC yopangidwa mwapadera kuti igwiritsidwe ntchito m'njira zosiyanasiyana - SiC epitaxy, GaN epitaxy, MOCVD systems, CVD reactors, ndi njira zina zosungira kutentha kwambiri.

Features Ofunika

● Kuyenda bwino kwa mpweya - Kapangidwe ka mabowo ndi njira zamkati zimakonzedwa bwino, kotero kufalikira kwa mpweya kumakhala kokhazikika komanso ngakhale m'dera lonse la ntchito. Izi zimathandiza kukonza kukhazikika kwa filimu ndi kutulutsa kwa wafer.

● Chophimba cha CVD SiC choyera kwambiri - Chophimba cha SiC cholimba chimalimbana bwino ndi mpweya wowononga, zomwe zikutanthauza kuti tinthu tating'onoting'ono komanso chiopsezo chochepa cha kuipitsidwa panthawi yopanga.

● Kukhazikika kwa kutentha kolimba - Graphite imapereka mphamvu yabwino yoyendetsera kutentha, ndipo chophimba cha SiC chimawonjezera chitetezo. Pamodzi zimathandiza mutu wa shawa kukhalabe ndi mawonekedwe ake pa kutentha kwambiri.

● Nthawi yayitali yogwira ntchito - Poyerekeza ndi zida wamba za graphite, mtundu wa CVD SiC wokhala ndi zokutira ndi wolimba kwambiri komanso wolimba. Mumapeza ndalama zochepa zokonza komanso ndalama zochepa zosinthira.

● Uinjiniya wapadera - Titha kusintha miyeso, mapangidwe a mabowo a gasi, njira zamkati, kapangidwe ka malo oikira - makamaka timasintha mutu wa shawa kuti ugwirizane ndi mapangidwe osiyanasiyana a reactor.

Maluso opanga

Semixlab imachita zinthu zambiri mkati:

● Kupanga graphite molondola

● Kuyika chophimba cha CVD SiC

● Makina ovuta opangira mpweya

● Kulamulira kolimba kwa kulekerera

● Kumaliza ndi kuyang'ana pamwamba

● Kukonza kapangidwe kake mwamakonda

Gulu lathu la mainjiniya limagwira ntchito limodzi ndi makasitomala popanga mitu ya shawa - kaya ya mapangidwe atsopano a zida kapena ngati zida zosinthira.

Chifukwa chiyani kusankha Semixlab?

● Chidziwitso cha nthawi yayitali ndi semiconductor graphite ndi SiC yokutidwa ndi zigawo

● Zipangizo zopangira zinthu zoyera kwambiri

● Ukadaulo wa mkati mwa nyumba wa CVD SiC

● Kupanga zinthu mwamakonda mosavuta

● Kulamulira khalidwe molimba mtima

● Yankho lachangu la zitsanzo ndi maoda opanga

Cholinga chathu ndi kupereka zida zodalirika za graphite zopangidwa ndi CVD SiC zomwe zimathandiza opanga ma semiconductor kukonza magwiridwe antchito a ntchito, kuchepetsa zoopsa za kuipitsidwa, komanso kugwira ntchito moyenera kwa nthawi yayitali.

SiC epitaxy - Amagwiritsidwa ntchito mu ma reactor a SiC epitaxial kufalitsa mpweya woyambira mofanana pa wafer, zomwe zimathandiza kukonza kufanana kwa zigawo ndikuchepetsa zolakwika.

GaN epitaxy - Imagwira ntchito ndi zida za MOCVD za ma LED, zamagetsi zamagetsi, ndi zida za RF.

Njira za CVD za semiconductor - Zofala kwambiri m'machitidwe osungira mpweya komwe kuperekedwa kolondola kwa mpweya ndi kuwongolera kuipitsidwa ndikofunikira kwambiri.

Kupanga kwapamwamba kwa semiconductor ya compound - Kumagwirizana ndi njira zosiyanasiyana zokulira makristalo otentha kwambiri komanso njira zochepetsera filimu.

Ubwino waukadaulo wa CVD SiC coverage

Chophimba cha CVD SiC chimapanga gawo loteteza loyera kwambiri komanso lolimba kwambiri pamwamba pa graphite. Mumapeza mphamvu yogwiritsira ntchito graphite komanso kutentha kwake, komanso kukana kwa mankhwala kwa silicon carbide.

Phindu lalikulu:

● Kupanga tinthu tating'onoting'ono tochepa

● Kulephera kwa dzimbiri

● Kukana kutentha bwino

● Kuchepa kwa kuipitsidwa kwa chitsulo

● Njira yokhazikika

● Nthawi yayitali ya moyo wa gawo

Ubwino uwu umapangitsa kuti ma shower heads okhala ndi CVD SiC akhale chisankho chabwino kwambiri popanga ma semiconductor apamwamba, komwe kusinthasintha kwa njira ndi ukhondo ndizofunikira.