6 inchi TaC yokutidwa ndi graphite chowotcha

Zotenthetsera za Semixlab za 6-inch TaC-zokutidwa ndi graphite nthawi zambiri zimagwiritsa ntchito gawo lapansi lopanikizidwa ndi isostatically kapena lapamwamba kwambiri la graphite. Dongosolo lotenthetsera (nthawi zambiri ulusi wokhazikika kapena mawonekedwe ozungulira) amapangidwa ndipo gawo loteteza la tantalum carbide (TaC) limayikidwa pamwamba kapena m'malo ofunikira. Zotenthetserazi zimagwiritsa ntchito kutentha kwamphamvu kuti zipereke kutentha kofanana komanso kodalirika kwa timipata tating'onoting'ono (monga 6" / 150 mm) kapena zotenthetsera.

Ⅰ. Maudindo mu Njira Zazikulu za Semiconductor

1. Epitaxy (SiC, GaN, ndi Si Layers)

Pakukula kwa epitaxial, chotenthetsera cha 6 inchi cha TaC chokutidwa ndi graphite ndi chinthu chofunikira kwambiri chomwe chimapangitsa kuti kutentha kwa gawo lapansi kukhale kokhazikika komanso kofanana. Kuwongolera kutentha koyenera ndikofunikira pakusunga makulidwe ofanana, mtundu wa kristalo, ndi kuchepa kwa chilema mu SiC, GaN, ndi Si epitaxy. Kupaka kwa TaC kumateteza gawo lapansi la graphite ku mipweya ya chlorinated ndi haidrojeni, yomwe imakhala yowononga kwambiri pakutentha kokwera. Izi zimatsimikizira moyo wautali wautumiki ndikuletsa kuipitsidwa ndi kutulutsidwa kwa tinthu m'chipindamo.

2. Chemical Vapor Deposition (CVD / MOCVD / PECVD)

M'machitidwe a CVD ndi MOCVD, ma heaters ndi ofunika kwambiri kuti azikhala ndi malo otetezedwa kuti filimu ikule. Kupaka kwa TaC kumapereka kukana kukokoloka kwa plasma komanso kusakhazikika kwamankhwala, kupangitsa chotenthetsera kukhala choyenera malo a PECVD ndi LPCVD komwe mitundu ya fluorine ndi chlorine imagwiritsidwa ntchito. Kutulutsa kwake kwakukulu komanso kusinthasintha kwamafuta kumatsimikizira kutentha ndi kuziziritsa mwachangu, kumathandizira kukhazikika kwadongosolo.

3. Njira Zophatikizira ndi Zowonjezera

Panthawi yotentha kwambiri ya dopant ndi kuyika pambuyo poyikira, kutentha kofananako ndikofunikira kuti mukwaniritse kutsegulira kolondola kwa dopant ndi mbiri ya diffusion. Chotenthetsera cha graphite chophimbidwa ndi TaC chimachepetsa kupsinjika kwa kutentha ndikuwonetsetsa kuti malo ozungulira amawongolera. Kukana kwake kwa okosijeni ndi kupalasa njinga kumapangitsa kudalirika komanso kubwerezabwereza pamachitidwe angapo.

4. Etching ndi Surface Chithandizo

M'malo owuma, zotenthetsera zomwe zimakutidwa ndi TaC zimagwira ntchito ngati nsanja zotenthetsera zomwe zimapirira mikhalidwe ya plasma ya fluorine ndi chlorine. The ❖ kuyanika amateteza graphite m'munsi kukokoloka ndi tinthu kumasulidwa, pamene kukhalabe matenthedwe bata pamwamba pa mtanda. Izi zimabweretsa kuwongolera bwino kwa etching ndikuchepetsa kuipitsidwa kwachipinda.

Ⅱ. Zida Zofunikira ndi Kapangidwe:

Graphite Susceptor: Magetsi abwino kwambiri, matenthedwe apamwamba kwambiri, ma machinability amphamvu, komanso kutentha pang'ono (kukonda kutentha kwachangu).

Kutentha Mawonekedwe a Dera: mphete zozungulira / zozungulira zimagwiritsidwa ntchito kukwaniritsa kutentha kwa radial; masinthidwe amitundu yambiri atha kugwiritsidwa ntchito kukonza bwino ma gradients/zosiyana.

Kupaka kwa TaC (Tantalum Carbide): Malo osungunuka kwambiri (≈3880 ° C), kuuma kwakukulu, kukana kwa mankhwala ndi madzi a m'magazi, komanso kuyendetsa bwino kwa magetsi. Monga chotchinga choteteza, chimachepetsa magwiridwe antchito ndi mpweya wopangira, kumachepetsa kukhetsa kwa tinthu, ndikuwonjezera moyo.

Kuphatikizana / Kumamatira: Kumamatira pakati pa TaC ndi graphite, makulidwe a zokutira, ndi kuwongolera kupsinjika ndizinthu zazikulu zowongolera, zomwe zimakhudza moyo ndi kudalirika.

Ⅲ . Njira Zovuta ndi zothetsera

Mukamagwiritsa ntchito 6 inchi TaC yokutidwa ndi graphite chowotcha mumayendedwe a semiconductor, pali mfundo zingapo zaumisiri zomwe zimafunikira kusamala. Kuthana ndi zovuta izi moyenera kumapangitsa kuti magwiridwe antchito azikhala okhazikika, moyo wautali wautumiki, komanso mawonekedwe osasinthasintha.

1. Kupaka Kumatira ndi Kuwopsa Kwa Peeling

Vuto:

Ngati zokutira za TaC sizikugwirizana kwambiri ndi maziko a graphite, zimatha kusenda kapena kusweka pambuyo potenthetsa ndi kuziziritsa mobwerezabwereza. Izi zitha kupanga tinthu tating'onoting'ono ndikuchepetsa moyo wa chotenthetsera.

yankho;

● Ikani zokonzekera zapamwamba kwambiri musanaziike (zotsekemera ndi kuyeretsa kuti muwonjezere mphamvu zomangira).

● Gwiritsani ntchito magawo okhathamiritsa a CVD kuti mukwaniritse wosanjikiza wa TaC wandiweyani komanso wofanana.

● Chitani kuyesa kumamatira panthawi yoyang'anira khalidwe kuti mupewe zolephera zobisika.

2. Kupanikizika kwa Matenthedwe ndi Kusweka

Vuto:

Kusintha kwa kutentha kwachangu panthawi ya RTP (Rapid Thermal Processing) kungapangitse kupsinjika pakati pa graphite ndi TaC wosanjikiza, zomwe zimapangitsa kuti ming'alu kapena kupindika.

yankho;

● Pangani chotenthetsera chokhala ndi mphamvu zofananira ndi kukula kwa kutentha pakati pa graphite ndi TaC.

● Gwiritsani ntchito zingwe zoyatsira moto kapena zoziziritsa kuti muchepetse kutenthedwa kwa kutentha.

● Gwiritsani ntchito graphite yoyera kwambiri, yabwino-grain graphite yokhala ndi kutentha kochepa kwa gawo lapansi.

3. Uniform Kutentha Kuwoloka Wafer

Vuto:

Ngati zokutira za TaC kapena maziko a graphite ali ndi makulidwe osagwirizana, amatha kuyambitsa malo otentha kapena madera ozizira, zomwe zimapangitsa kuti pakhale zolakwika.

yankho;

● Ikani makina olondola ku gawo lapansi la graphite ndi kulolerana kokhazikika.

● Onetsetsani kuti mukuvala mofanana ndi kuwongolera kwapamwamba kwa CVD.

● Gwiritsani ntchito mapu otenthetsera panthawi yowongolera kuti mutsimikizire kugawidwa kwa kutentha kosasinthasintha.

4. Utumiki wa Moyo Wonse ndi Kusintha Kwake

Vuto:

M'kupita kwa nthawi, ngakhale zotenthetsera zabwino kwambiri zimawonongeka pansi pazovuta kwambiri, zomwe zingayambitse kutsika kosayembekezereka.

yankho;

● Khazikitsani ndandanda yodziwiratu yoti idzalowe m'malo motengera nthawi yogwira ntchito komanso mmene mpweya umapangidwira.

● Khalani ndi zotenthetsera kuti muchepetse kusokoneza.

● Gwirani ntchito ndi wothandizira kuti muyese kuyesa kwa moyo wanu wonse ndi kusanthula kulephera kuti muwongolere mosalekeza.

Kwenikweni, zida ndi kapangidwe ka 6 inchi TaC yokutidwa ndi graphite chotenthetsera zimatsimikizira kukhazikika kwa kutentha, kukana kwa dzimbiri, komanso kukhulupirika kwamapangidwe, ndikupangitsa kuti ikhale gawo lofunikira kwambiri pamayendedwe apamwamba a epitaxy, CVD, ndi ma diffusion. Khalani omasuka kutifunsani kuti mupeze mayankho osinthika.