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Mpweya wa Carbon Composite Crucible
Carbon Composite Crucible (C/C Crucible) yochokera ku Semixlab idapangidwa kuti ikhale malo ovuta kwambiri pakukula kwa kristalo wa semiconductor ndi epitaxial processing. Semixlab's Carbon Carbon Composite Crucible idapangidwa pogwiritsa ntchito ma fiber apamwamba a modulus carbon ndi matrices apamwamba kwambiri a kaboni, kukwaniritsa mbiri yofananira ndi kukula kwa CZ silicon, silicon epitaxy, ndi SiC PVT sublimation kukula. Kaya za nsalu zowotcha za silicon zomwe zimakulitsa kufanana kwa ingot, opanga ma epitaxy akukhathamiritsa kufananizidwa, kapena opanga ma SiC kukulitsa mipiringidzo yokulirapo, Carbon Carbon Composite Crucible imapereka maziko olimba, osaipitsidwa pang'ono popanga makina amakono a semiconductor.
Kufotokozera
Pakukula kwa silicon crystal (Czochralski process), crucible ya C / C imagwiritsidwa ntchito makamaka ngati chothandizira chokhazikika komanso chokhazikika chamafuta ozungulira crucible yamkati ya silika. Kukula kwake kwamafuta ochepa, mphamvu zamakina apamwamba, komanso kukana kugwedezeka kwamphamvu kwamafuta kumathandizira kusunga ma geometry a crucible panthawi yomwe amakoka nthawi yayitali, kuchepetsa kupindika kwa quartz ndikupangitsa kutentha kofananako. Izi zimathandizira mwachindunji pakuwongolera kusuntha, moyo wautali wogwiritsiridwa ntchito wa quartz, komanso kusinthika kofanana mu ingot ya monocrystalline silicon.
Mkati mwa silicon ndi SiC epitaxy system, Carbon Carbon Composite Crucible imagwira ntchito ngati chonyamulira chokhazikika cha kutentha kwambiri komanso gawo lowongolera matenthedwe, kuthandizira zoyatsira ndi zopangira zowotcha. Kuthekera kwa kompositiyo kukhalabe olimba komanso kusakhazikika kwamankhwala mu hydrogen, chlorinated, kapena malo opanda vacuum ndikofunikira kuti muchepetse kuipitsidwa ndikukwaniritsa kutenthedwa koyenera. Zotsatira zake zimakhala makulidwe amtundu wa epitaxial wosasinthasintha, mawonekedwe apamwamba a chipangizocho, komanso nthawi yowonjezereka ya riyakitala.
Pakukula kwa SiC monocrystal pogwiritsa ntchito Physical Vapor Transport (PVT), C/C crucible imakhala gawo lalikulu la chipinda chocheperako. Kutentha kodabwitsa kwamitundu ya carbon-carbon composites - kupitirira 2200 ° C m'mlengalenga mopanda mpweya - kumalola kuti crucible ikhale yolimba kwa nthawi yayitali ndikusunga malo otentha otentha omwe amafunikira kuchepetsa chilema m'mabotolo a SiC. Zomwe zili zonyansa zochepa komanso kupanga tinthu tating'onoting'ono kumachepetsa chiopsezo cha doping mwangozi ndi kufalitsa kwa micropipe, kuthandizira kupanga makhiristo apamwamba a 4H ndi 6H SiC omwe amagwiritsidwa ntchito pamagetsi apamwamba kwambiri.
Zopangidwira zida zam'tsogolo za semiconductor, crucible ya Semixlab C / C imathandizira zokolola zambiri, moyo wautali wa zida, komanso mawonekedwe apamwamba a kristalo pamapulatifomu angapo opanga. Semixlab's Carbon Composite Crucible imapangidwa mosamalitsa njira, kuphatikiza kusankha koyambirira koyera kwambiri, kachulukidwe kakang'ono, komanso chithandizo chapamtunda. Zotsatira zake ndi crucible yokhala ndi kukhazikika kowoneka bwino, kukulitsa kukana kwa okosijeni, komanso kuchepetsedwa kwambiri kwa tinthu ting'onoting'ono poyerekeza ndi njira zina za graphite. Chilichonse chimawunikiridwa mwatsatanetsatane komanso kutsimikizika kwamafuta-mawotchi kuti zitsimikizire kuti zimagwira ntchito mosasinthasintha mu zokoka zamakampani a CZ, ma epitaxy reactor oyima / opingasa, ndi ng'anjo za SiC PVT.
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