Nchifukwa chiyani mphete zotsekera za SSiC zimagwiritsidwa ntchito kwambiri mu njira ya Semiconductor Etch?

Mu kupanga zinthu zamakono za semiconductor, njira yopangira etch ndi imodzi mwa njira zovuta kwambiri. Kutentha kwambiri, mpweya woopsa, komanso kuzungulira kwachangu kumatha kuwononga zida mwachangu, makamaka zisindikizo zomwe zimasunga chipindacho kuti chisalowe mpweya. Zisindikizo zachikhalidwe za graphite kapena ceramic nthawi zambiri sizingathe kuthana ndi izi, zomwe zimapangitsa kuti zisamalidwe nthawi zambiri komanso kuti zisamagwire ntchito. Posachedwapa, mphete zotsekera za sintered silicon carbide (SSiC) Zatchuka chifukwa zimakhala zolimba komanso zosagwirizana ndi mankhwala. Zimapirira kutentha ndi dzimbiri bwino, zomwe zimathandiza kuti zipangizo zizigwira ntchito kwa nthawi yayitali komanso modalirika, zomwe ndi phindu lalikulu kwa mafakitale omwe akuyesera kusunga kupanga kwakukulu.

Zofunikira pakutseka magwiridwe antchito m'malo osungira plasma

Mu makina otsekerera a plasma, mphete zotsekerera zimagwira ntchito yofunika kwambiri pakusunga njira yokhazikika komanso chipinda choyera, ndipo zimakumana ndi zovuta kwambiri popanga semiconductor. Mkati mwa chida chotsekerera, plasma yamphamvu kwambiri, mpweya wochitapo kanthu, ndi kusintha kwa kutentha mwachangu zimatha kuwononga zinthu zomwe sizili bwino. Ngakhale kutayikira pang'ono kumatha kulola mpweya wochita kuthawa kapena zodetsa kulowa, zomwe zimakhudza kufanana kwa etch ndi kutulutsa kwa wafer. Kuti igwire bwino ntchito, mphete yotsekerera iyenera kuthana ndi kutentha ndi kuzizira mobwerezabwereza popanda kusweka kapena kupanga mipata, kupewa kuukira kowononga kwa mpweya wambiri wotsekerera, ndikusunga bata la makina pansi pa kusintha kwa kupsinjika ndi kupsinjika. Zipangizo zachikhalidwe za graphite kapena zadothi nthawi zambiri zimavutika kukwaniritsa zosowa zonsezi, pang'onopang'ono zimawonongeka pakapita nthawi ndikusiya tinthu tomwe tingadetse ma wafer. Sintered silicon carbide, kapena SSiC, yatuluka ngati njira ina yamphamvu. Kapangidwe kake ka zinthu kamathandiza kuti ipirire kutentha kwambiri popanda kukula kochepa, kukana kuwonongeka kwa mankhwala, ndikusunga mawonekedwe ake nthawi zambiri. Kusasinthasintha kumeneku kumatsimikizira magwiridwe antchito odziwikiratu kuchokera ku gulu kupita ku gulu ndipo kumachepetsa kusokonezeka kosamalira. Kwa mainjiniya omwe amagwiritsa ntchito zida zotsekerera za plasma, pogwiritsa ntchito Mphete za SSiC Zingapangitse kusiyana kwakukulu, kukweza luso la kupanga komanso ubwino wa ma wafer opangidwa, zomwe ndizofunikira kwambiri popanga ma semiconductor ambiri.

Mankhwala ndi makina a sintered silicon carbide

Sintered silicon carbide, kapena SSiC, ndi chinthu chopangidwa kuti chigwire bwino ntchito zovuta za semiconductor etch kuposa zinthu zambiri zotsekera zachikhalidwe. Mwa mankhwala, imapirira pafupifupi mpweya wonse wogwiritsidwa ntchito mu plasma etching, kuphatikiza mpweya wochokera ku fluorine ndi chlorine, kotero imalimbana ndi dzimbiri ndi kuwonongeka ngakhale patatha mazana kapena zikwi za maulendo. Mosiyana ndi zimenezi, graphite kapena alumina seals yokhazikika imatha kuwonongeka pang'onopang'ono, kusiya tinthu ting'onoting'ono tomwe tingaipitse ma wafers. Kukhazikika kwa mankhwala kumeneku kumapangitsa kuti njira ya etch ikhale yoyera komanso yogwirizana. Mwa makina, SSiC ndi yolimba kwambiri komanso yolimba, yokhala ndi kapangidwe kolimba, kofanana komwe kamalimbana ndi kusweka ndi kusinthika pansi pa kutentha kwakukulu komanso kupsinjika kwa makina. Mphete zotsekera mu zida za plasma etch zimakanikizidwa mobwerezabwereza pamene chipindacho chikusonkhanitsidwa ndikukakamizidwa, ndipo Mphete za SSiC Amasunga mawonekedwe awo m'njira zonsezi, kuonetsetsa kuti nthawi zonse amakhala otsekedwa bwino. Kutentha kwake kochepa kumachepetsanso mipata yomwe ingasokoneze mpweya wa chipindacho. Kuphatikiza apo, SSiC ndi yosatha kutha, imapirira kukangana ndi malo ogwirizana popanda kusweka kapena kusweka, zomwe zimawonjezera nthawi ya mpheteyo ndikuchepetsa nthawi yogwira ntchito yokonza. Ponseponse, kuphatikiza kwa kukana mankhwala, mphamvu ya makina, kukhazikika kwa kutentha, ndi kulimba kumapangitsa SSiC kukhala chisankho chodalirika kwa mainjiniya, kuthandiza zida zokoka kugwira ntchito nthawi yayitali, zoyera, komanso zodziwikiratu bwino pansi pa mikhalidwe yovuta kwambiri.

Kuyerekeza pakati pa zisindikizo za SSiC, graphite, ndi graphite zokutidwa

Posankha mphete zotsekera zida zoyeretsera za plasma, zimathandiza kumvetsetsa kusiyana pakati pa graphite, graphite yokhala ndi zokutira, ndi SSiC, chifukwa chilichonse chimagwira ntchito mosiyana pamikhalidwe yosiyanasiyana. Graphite yakhala chisankho chachikhalidwe chifukwa ndi yosavuta kuigwiritsa ntchito komanso yotsika mtengo, ndipo imagwira ntchito kutentha pang'ono komanso kupsinjika bwino. Komabe, m'malo ovuta a etch, graphite imatha kusowa mwachangu, kuchitapo kanthu ndi mpweya, ndikupanga tinthu tating'onoting'ono, zomwe zimawonjezera zoopsa zowononga komanso zosowa zosamalira. Kukula kwake kwakukulu kwa kutentha kumapangitsanso kuti ikhale ndi mwayi wopanga mipata panthawi yotenthetsera ndi kuzizira. Graphite yokhala ndi zokutira imawonjezera zofooka izi powonjezera wosanjikiza woteteza, nthawi zambiri wa chinthu cholimba monga tantalum carbide, chomwe chimawonjezera kukana kwa mankhwala ndikuchepetsa kukokoloka. Ngakhale graphite yokhala ndi zokutira imakhala nthawi yayitali kuposa graphite wamba, zokutirazo zimatha kutha, ndipo zolakwika mu wosanjikiza zimatha kuchepetsa kugwira ntchito, zomwe zimawonetsa graphite yomwe ili pansi pake. Sintered silicon carbide, kapena SSiC, imapereka magwiridwe antchito amphamvu kwambiri pazinthu zofunikira za etch. Ndi yopanda mankhwala ku mpweya wambiri wa etch, imakhala ndi kutentha kochepa kwambiri, ndipo imasunga mphamvu zamakanika pamayendedwe ambiri. Mosiyana ndi graphite yokhala ndi zokutira, zinthu zake zimakhala zofanana nthawi zonse, kotero palibe chiopsezo chakuti pakati pofooka pakhale powonekera. Kulimba kumeneku kumachepetsa kusokonezeka kwa ntchito, kupanga tinthu tating'onoting'ono, ndi kukonza, zomwe zimapangitsa SSiC kukhala chisankho chomwe chimakondedwa kwambiri pakupanga plasma yochuluka komanso yolimba komwe nthawi yogwira ntchito komanso mtundu wa wafer ndizofunikira kwambiri, pomwe graphite kapena graphite yokhala ndi zokutira ikhoza kulandiridwa pazinthu zosavuta.

Gwiritsani ntchito zipinda zouma zotsukira, CVD, ndi vacuum processing chambers

Mphete zosindikizira za SSiC Zikuchulukirachulukira m'zipinda zosiyanasiyana za semiconductor process chifukwa zimatha kupirira mikhalidwe yovuta kwambiri mumakampani. Mu zida zouma za etch, malo okhala ndi plasma ndi amphamvu kwambiri, ndi mpweya wochitapo kanthu monga CF₄, SF₆, ndi Cl₂ umaukira zinthu zambiri zachikhalidwe. Mphete za SSiC zimalimbana ndi dzimbiri kuchokera ku mpweya uwu ndipo zimasunga chisindikizo cholimba ngakhale kutentha ndi kuzizira mwachangu, zomwe zimathandiza kusunga kufanana kwa etch ndikuchepetsa kuipitsidwa, chinthu chofunikira kwambiri pama node apamwamba pomwe ngakhale tinthu tating'onoting'ono tingawononge wafer. Muzipinda za chemical vapor deposition (CVD), kutentha nthawi zambiri kumapitirira 1,000°C, ndipo zoyambira zowononga zimatha kuwononga mwachangu graphite kapena ceramic seals. Kukana kwa mankhwala a SSiC ndi kukhazikika kwa kutentha kumalola nthawi yayitali yoyika popanda kulephera kwa chisindikizo, kukonza nthawi yogwira ntchito ya chida ndikuchepetsa ndalama zosamalira. Zipinda za vacuum process zimapindulanso ndi SSiC, chifukwa kupeza vacuum yapamwamba kwambiri kumafuna zisindikizo zomwe sizimatuluka mpweya kapena kusokonekera pakasintha kupanikizika. Kukula kochepa kwa kutentha kwa SSiC ndi mphamvu zamakina zolimba zimathandiza kusunga vacuum yolimba, yomwe ndi yofunika kwambiri pazinthu monga atomic layer deposition kapena plasma etching komwe kuyera kwa mpweya ndi kukhazikika kwa kuthamanga kumakhudza mwachindunji mtundu wa wafer. Zochitika zenizeni zikuwonetsa kuti kusintha kuchokera ku graphite yokhala ndi utoto kupita ku SSiC mu zida zouma za 300 mm kumawonjezera moyo wa zida, kumachepetsa zolakwika zokhudzana ndi tinthu tating'onoting'ono, komanso kumachepetsa nthawi yogwira ntchito. Mu zida za CVD, SSiC imathandiza kusunga kufanana kwa utoto pakapita nthawi. Ponseponse, SSiC imaphatikiza kukana kwa mankhwala, kulimba, komanso kukhazikika kwa kutentha, zomwe zimapangitsa kuti ikhale chisankho chodalirika kwambiri m'mitundu yambiri ya zipinda zomwe zimagwiritsidwa ntchito popanga zinthu zamakono za semiconductor.