Udindo wa SiC-Coated Susceptors mu Veeco LED Epitaxy Processes

Malo otentha kwambiri komanso osavuta kuwaona, ndipo kusintha pang'ono kwa malo kumabweretsa mtundu wosiyana wa wafer. Susceptor ndi gawo lofunika kwambiri lomwe limakhala mu reactor. Imathandizira wafer panthawi ya kukula kwa epitaxy, imagwiranso ntchito yofunika kwambiri pakugawa kutentha kwa wafer yonse mofanana. Makina ambiri a Veeco LED epitaxy amagwiritsa ntchito susceptor ya graphite yokutidwa ndi SiC. Chophimba cha SiC chimatha kuteteza graphite kuti isawonongeke ndi kutentha ndi mankhwala, ndikupatsa LED mtundu wofanana.

Momwe Kuphimba kwa CVD SiC Kumathandizira Kufanana kwa Kutentha mu Zida za Veeco EPIK

Kusunga wafer pa kutentha koyenera popanga ma LED apamwamba kwambiri ndi chinthu chofunikira kuganizira. Cvd izi Kuphimba kumapangitsa kuti malo osalala azikhala olimba pa graphite susceptor yomwe imagawa kutentha mofanana panthawi ya kukula kwa gawo la SiC LED.

Ngakhale palibe Kupaka kwa cvd Ngati imagwiritsidwa ntchito, kusiyana pang'ono mkati mwa ma graphite osiyanasiyana kungayambitse kusiyana kwa mawonekedwe osinthira kutentha pamwamba, komabe ndi utoto wapamwamba wa CVD SiC, mawonekedwe osinthira kutentha pamwamba amakula kwambiri ndipo motero mawonekedwe a kutentha amakhala ofanana. Malo amodzi anali ndi mavuto ndi mitundu yosafanana pa ma wafer ake, chifukwa cha kutentha kosafanana pamwamba pake. Komabe, pogwiritsa ntchito CVD SiC yokhuthala komanso yapamwamba komanso CVD TaC Kuphimba kunagonjetsa kusakhazikika kumeneku.

Zofooka pamwamba ndi mikwingwirima ya CVD SiC coating ndi Mkulu chiyero CVD SiC yaiwisi Zingawonjezere kusinthasintha chifukwa zimapangitsa kuti zinthu zikule mofanana, kapena kuti pakhale 'malo otentha' pamwamba pa chophimbacho. Ma coverage nthawi zonse amawunikidwa kuti awone ngati akuwonongeka kapena ming'alu ndi opanga ambiri poona momwe CVD SiC coating ilili pambuyo pa nthawi zosiyanasiyana zotenthetsera. Chopoperacho chikhoza kuzunguliridwa panthawi yonse ya CVD kuti chiwonjezere kufanana ndi kulimba kwa CVD SiC coating.

Komabe, kugwiritsa ntchito chophimba cha CVD SiC sikungathetse kusiyana konseku koma kumapangitsa kuti zikhale zotheka kwambiri kupanga zinthu zoyambira zopangira LED pamlingo waukulu nthawi zonse.

Ntchito ya High-Purity Graphite Susceptors mu LED Epitaxy

Chotsukira chimathandizira ndikusunga wafer pa kutentha kokhazikika pamene galasi likukula. Graphite nthawi zambiri imagwiritsidwa ntchito, ndipo kwenikweni graphite yoyera kwambiri iyenera kugwiritsidwa ntchito chifukwa ingagwiritsidwe ntchito kutentha kwambiri ndipo sidzasintha.

Kutentha kwakukulu kumeneku kumathandiza kusamutsa kutentha kuchokera ku zinthu zotenthetsera kupita ku wafer ndikukhazikitsa kutentha kwa wafer pamene wosanjikiza ukukula. Popeza kusintha pang'ono kwa kutentha kumapangitsa kukula kwa kristalo kusintha, kuyenera kukhala kokhazikika momwe kungathekere.

Kuyera ndi chinthu chofunikira kwambiri pa graphite yomwe imagwiritsidwa ntchito. Grafiti yodetsedwa imakhala ndi zitsulo ndi zinthu zina zodetsedwa zomwe zimatuluka mu susceptor panthawi yotenthetsera ndikuyikidwa pa wafer zomwe zimapangitsa kuti pakhale zolakwika zamakristalo.

Opanga ena adawona kuwonjezeka kwa ma LED omwe ali ndi vuto pogwiritsa ntchito graphite yosayera kwenikweni. Grafiti yoyera kwambiri komanso kuwunika kokhwima kwapereka zotsatira zabwino. Vuto lina ndi kusalala kwa susceptor.

Pambuyo pa kutentha ndi kuzizira kangapo, chotenthetseracho chikhoza kusokonekera. Kusokonekera kumeneku kumakhudza kuyenda kwa mpweya ndi malo osungiramo wafer, zomwe zonse zimakhudza kukhazikika kwa kukula kwa zigawo.

Kuchepetsa Mavuto a Tinthu mu Epitaxy Kudzera mu Kapangidwe Koyenera ka Malo Ozungulira

Mavuto ambiri a tinthu timeneti amayamba ndi malo omwe ziwalo ndi mpweya zimakumana. Ma susceptor, ma liners ndi zina zotero amatha kutulutsa tinthu pang'onopang'ono pakapita nthawi pamene malo awo akukanda kapena kutopa.

Mu mpweya wotentha kwambiri, ming'alu yaying'ono kapena kusweka kwa gawo lophimba kumatha kupanga zidutswa zazing'ono zomwe zingadutse mu reactor ndikugwera pa ma wafer. Ndi kukula kokwanira, tinthu tating'onoting'ono pamwamba pa wafer imodzi timabweretsa vuto limodzi pa LED yomaliza.

Kusalala kudzachepetsa mwayi woti tinthu tating'onoting'ono tituluke, komabe tiyenera kukhala ndi mphamvu yopirira kutentha mobwerezabwereza. Kupaka kwina kungawoneke ngati kuli ndi malo abwino kutentha kwa chipinda pamene kumapanga ming'alu yaying'ono pambuyo pothamanga kangapo. Mavuto a tinthu tating'onoting'ono nthawi zambiri amapezeka pang'onopang'ono pamene tinthu tating'onoting'ono tavala.

Pazigawo zambiri zogwirira ntchito, kuwonongeka kumakhala m'mphepete chifukwa gawoli limakhala ndi kupsinjika kwakukulu. Mwa kuwongolera ubwino, makulidwe a chophimba ndi kuchuluka kwa kupsinjika m'mphepete, titha kuchepetsa kusweka.

Choncho, kuti chivundikirocho chisatuluke pambuyo poyesa nthawi iliyonse, kumangirira kwa chivundikirocho ndi graphite substrates kuyenera kukhala bwino. Kuyang'ana pafupipafupi mu kuwala kowala kapena kutengera zitsanzo kungapereke chenjezo la mavuto omwe akubwera.

Kuyerekeza Bare Graphite ndi SiC-Coated Susceptors mu LED Production

Ngakhale kuti ma susceptor onse a graphite ndi SiC coated amagwiritsidwa ntchito popanga LED, amagwira ntchito mosiyana kwambiri pazigawo zawo zogwirira ntchito.

Zifukwa zomwe graphite yopanda kanthu imagwiritsidwa ntchito ndichakuti imagwira ntchito bwino potumiza kutentha ndipo ili ndi malo akuluakulu owonekera kuti ilandire kutentha, ndipo imakhala ndi tinthu tomwe timatuluka pang'onopang'ono kuchokera pamwamba pake patatha maola ochepa, ngakhale ili ndi zovuta zina. Izi ndi monga kufalikira kochepa kwa kutentha komanso malo okwera pamwamba pake kumapangitsa kuti ikhale yogwirizana kwambiri ndi mpweya womwe uli mkati mwa chipindacho ndipo motero imatulutsa tinthu tating'onoting'ono mwachangu, ngakhale kuti nthawi zambiri imakhala yosiyana.

Chophimba cha SiC chimathetsa mavuto ena mwa awa powonjezerapo chophimba cholimba choteteza.

Munthu angayang'ane zinthu zopangidwa ndi LED zomwe zimagwira ntchito mochuluka kudzera munthawi yopanga pomwe pamafunika kusintha kwa nthawi yayitali. Zinthu zina zopangidwa ndi graphite zimapeza kuti pakapita nthawi yayitali, kusintha kwa kutentha kwa wafer kumachitika pang'onopang'ono pambuyo pa nthawi zingapo zotenthetsera. Pamwamba pa susceptor pamawoneka ngati pakusintha pang'onopang'ono ndipo motero kugawa kutentha kumakhala kosakhazikika.

Kugwiritsa ntchito ma susceptor okhala ndi SiC nthawi yayitali kumatanthauza kuti kusiyana kumeneku kwa kufanana kwa wafer sikumachitika kawirikawiri, mwachitsanzo, ndi fakitale imodzi, kusinthana ndi SiC yokhala ndi SiC kumatanthauza kuti mizere yawo siyenera kusinthidwa pafupipafupi posintha kuchokera ku magulu osiyanasiyana.

Makhalidwe a kutentha amatha kufufuzidwa. Graphite ya Bare ikuwoneka kuti ikupanga kutentha kosakhazikika pamwamba pake. Izi zikuganiziridwa kuti ndi chifukwa cha kusintha pang'onopang'ono kwa pamwamba komanso chifukwa cha gawo lina losadziwika la chophimbacho.

Chophimba cha SiC chimatseka pamwamba, chimaletsa kusintha, zomwe zikutanthauza kuti kusamutsa kutentha kumakhala kosalekeza. Zotsatira zake pa ma LED ndikuti ngati gawo lomwe lakula likusintha kutentha, kutalika kwa mafunde/kuwala kudzasinthanso.

Pali zovuta zachilengedwe zogwiritsa ntchito ma susceptor okhala ndi SiC; mtengo wawo ndi wakuti, ngakhale kuti alibe tinthu tating'onoting'ono, amatulutsa tinthu tating'onoting'ono ngati tasweka, motero amatha kuyambitsa tinthu tating'onoting'ono m'malo mochepetsa.

Choncho, njira zowunikira mosamala ndi kukonza zokutira zawo ziyenera kutsatiridwa kuti zisawonongeke chilema chisanachitike, ngakhale, pogwiritsa ntchito zokutira zosatha, ziyenera kukhalapo kwa nthawi ndithu, pomwe zidzasinthidwa.

Njira Zosamalira ndi Kuyeretsa Zida Zosungiramo Zinthu za Veeco Zokhalitsa

Kusunga ziwalo za Veeco zili bwino kudzawonjezera nthawi ya moyo wa ziwalozo ndikusunga kukhazikika kwa njira ya epitaxy. Zotsalira zimawonjezeka pakapita nthawi pa ma susceptors, ma liners ndi mphete zophimbidwa. Kuwonjezeka kwa zotsalira, ngakhale m'magawo ochepa ngati omwe angadziwike, kungakhudze momwe kutentha kumayankhira pamwamba ndikupangitsa kuti njirayo ikhale yosagwira ntchito bwino.

Mainjiniya wina adanena kuti adawona kuwala kosagwirizana kwa LED kapena zotsatira zoyipa za wafer kenako adafufuza zotsalira ngati gwero la vutoli. Njira zosiyanasiyana zoyeretsera ziyenera kupangidwa pazinthu zosiyanasiyana. Zigawo za graphite zoyera kwambiri siziyenera kuwonetsedwa ku mankhwala okwiyitsa kapena njira zotsukira chifukwa njirazi zimatha kuvala gawolo.

Magawo angapo opanga zinthu amangogwiritsa ntchito njira zoyeretsera plasma nthawi yake kapena njira zina zosungira kuti achotse zinthu zomwe zawunjikana. Ndikofunikanso kugwira mosamala zinthu zomwe zili ndi SiC. Ngakhale kuti gawoli ndi lolimba, mabala ndi mikwingwirima yomwe imachitika panthawi yoyeretsa pamapeto pake imayambitsa ming'alu yaying'ono yomwe ingakhale magwero a tinthu tating'onoting'ono. Mzere umodzi wopanga zinthu unathetsa vutoli pogwiritsa ntchito zipangizo zoyeretsera zofewa ndikupanga njira yabwino yogwiritsira ntchito zigawozi.

Kusamalira nthawi zonse za gawo kumachitikanso mukatsuka. Kungoyang'ana mwachangu kuti muwone ngati pali kusintha kwa mtundu, ming'alu yaying'ono kapena kufalikira kosagwirizana kungathandize kupeza umboni woyamba wa kulephera kwa gawo. Zinthu zambiri zatsopano zimagwiritsa ntchito kuyang'anira moyo wa gawo m'malo modalira kusintha kwa gawo pogwiritsa ntchito kulephera. Gawolo lidzasinthidwa vuto lisanawonekere.

Kusunga nthawi zambiri kumaonedwa ngati koyera. Ngakhale kuti zinthuzo ndi zoyera, zimakhala zosavuta kuipitsidwa ndi fumbi ndi chinyezi zikasungidwa panja ndipo ziyenera kutsekedwa m'zidebe zoyera musanazigwiritse ntchito kachiwiri.

Pakapita nthawi, zimaonekeratu kuti chinsinsi cha moyo wautali ndi zinthu zazing'ono, zomwe zimachitika modalirika tsiku lililonse. Kuti njira yoyeretsa mofatsa, kusamalira mosamala, komanso kuyang'anira nthawi zonse moyo wa gawo kungakhudze kwambiri kukhazikika kwa epitaxy.