Mphete ya Mthunzi wa Quartz 200mm

Mphete ya AMAT 0200-10445 Quartz Shield Ring (200 mm) ndi gawo lowongolera m'mphepete mwa quartz loyera kwambiri lomwe lapangidwira makamaka makina odulira plasma. Ili m'gulu la mphete zoteteza, zomwe ndizofunikira kwambiri powongolera kuyanjana kwa plasma m'mphepete mwa wafer panthawi yokonza semiconductor.

Chopangidwa kuchokera ku quartz yopangidwa ndi ultra-high-purity fused, gawo ili lapangidwa kuti ligwire ntchito pansi pa zovuta kwambiri, kuphatikizapo:

● Malo okhala ndi mphamvu zambiri m'magazi

● Mankhwala ochokera ku fluorine ndi chlorine

● Kusinthasintha kwa kutentha mobwerezabwereza

Mosiyana ndi zigawo zodzitetezera wamba, mphete ya mthunzi ndi gawo lofunikira kwambiri lomwe limakhudza mwachindunji mawonekedwe a etch, kufanana, ndi kuwongolera kofunikira (CD).

Ku Semixlab Technology, mphete zathu za quartz zimapangidwa pogwiritsa ntchito njira zotsatirazi:

● Kusankha bwino zinthu zopangira kuti zitsimikizire kuti palibe kuipitsidwa

● Makina opangidwa mwaluso kwambiri kuti atsimikizire kuti ali ndi mawonekedwe ofanana

● Kukonza bwino pamwamba kuti muchepetse kupanga tinthu tating'onoting'ono

Izi zimatsimikizira kuti ntchito yokhazikika komanso yobwerezabwereza imachitika bwino kwambiri.

Common Kulephera Modes

Monga gawo logwiritsidwa ntchito lomwe limapezeka m'malo ovuta a plasma, mphete za quartz zomwe zimakhala ndi mithunzi zimakhudzidwa ndi njira zotsatirazi zowononga:

1. Kuwonongeka Koyambitsidwa ndi Plasma

● Kuphulika kosalekeza kwa ayoni kumapangitsa kuti pamwamba pakhale kuuma

● Kutayika pang'onopang'ono kwa zinthu kumasintha mawonekedwe a geometri

Zotsatira:

Kuwonongeka kwa magwiridwe antchito owongolera m'mphepete, zomwe zimapangitsa kuti pakhale kusiyana kwa magawo ofunikira (CD) komanso kusakhazikika kwa mbiri.

2. Kuyika kwa Polima ndi Zopangidwa Zina

● Zinthu zomwe zimapangidwa ndi njira zimasonkhana pamwamba pa quartz

● Ndalama zomwe zasungidwa zitha kutha ntchito

Zotsatira:

Kuchuluka kwa kuipitsidwa kwa tinthu tating'onoting'ono ndi kuchuluka kwa zilema pa ma wafer.

3. Kusweka kwa Kutentha

● Kutenthetsa ndi kuziziritsa mobwerezabwereza kumabweretsa mavuto mkati

● Ming'alu ing'onoing'ono ingafalikire, zomwe zingachititse kuti kapangidwe kake kawonongeke

Zotsatira:

Kusweka kosayembekezereka ndi nthawi yoti zida zisagwire ntchito.

4. Kupanga Tinthu Timene Timakhalapo Chifukwa cha Kukalamba kwa Zinthu

● Kupezeka kwa plasma kwa nthawi yayitali kumawononga umphumphu wa quartz

● Ming'alu yaing'ono imatulutsa tinthu tating'onoting'ono m'chipindamo

Zotsatira:

Kuchepa kwa mphamvu ndi kuchepa kwa kudalirika kwa chipangizo.

Chifukwa Chiyani Sankhani Semixlab?

Ndi ukadaulo wozama mu zida za semiconductor ndi zigawo za njira, Semixlab Technology imapereka zida zosinthira zogwira ntchito bwino zomwe zimakwaniritsa kapena kupitirira miyezo ya OEM:

● Quartz yoyera kwambiri yogwiritsidwa ntchito pochiza matenda

● Ma geometri opangidwa bwino kwambiri kuti azilamulira bwino m'mphepete

● Nthawi yayitali yogwirira ntchito komanso kuchepetsa mtengo wa umwini (CoO)

● Mapangidwe ogwirizana ndi OEM omwe amalumikizana bwino ndi nsanja za AMAT

Mphete zathu za quartz zooneka ngati mithunzi zimadaliridwa ndi opanga zinthu za semiconductor, zomwe zimathandiza opanga omwe akufuna njira zina zodalirika, zotsika mtengo, komanso zogwira ntchito bwino kwambiri popangira ma plasma.

Malo ndi Ntchito za Zipangizo

Malo Osungirako

Mphete za mthunzi wa quartz nthawi zambiri zimayikidwa:

● Kuzungulira dera la m'mphepete mwa wafer

● Pamwamba kapena pafupi ndi chuck yamagetsi (ESC)

● Mkati mwa dera la plasma sheath la chipinda chosungiramo zinthu

Imagwira ntchito limodzi ndi zigawo zina za m'mphepete (monga mphete zolunjika ndi mphete zophimba) kuti ipange dongosolo lonse lowongolera m'mphepete.

Ntchito Zazikulu

1. Kuteteza Plasma ndi Kugawa kwa Ion

Ntchito yaikulu ya mphete ya chishango ndikupanga "zoteteza":

● Kusankha kuletsa kapena kusintha momwe plasma imaonekera pamphepete mwa wafer

● Kusintha ma angles a ioni ndi kugawa kwa ioni

Results:

Kuwongolera bwino kwa mbiri ya etch, kuphatikiza ma ngodya am'mbali ndi kukhulupirika kwa mawonekedwe.

2. Kukonza Kofanana kwa Mphepete

Kudzera mu mawonekedwe ake opangidwa bwino (kutalika, mpata, ndi mbiri), mphete ya mthunzi imatha:

● Chepetsani zotsatira za kupsa kwambiri m'mphepete mwa ...

● Sinthani kufanana kwa etch rate pa wafer

Zotsatira:

Zimathandizira kuti zinthu zikhale zofanana kwambiri (CD) ndipo zimawonjezera phindu la wafer edge.

3. Kukhazikika kwa Njira ndi Kubwerezabwereza

Gawo ili limakhazikitsa khalidwe la plasma m'dera la m'mphepete mwa:

● Kusunga mikhalidwe yokhazikika ya plasma sheath

● Chepetsani kusinthasintha kwa njira zogwirira ntchito panthawi yogwira ntchito yochuluka

ubwino:

Zimathandizira kukhazikika kwa mawindo a ntchito komanso kubwerezabwereza popanga zinthu zambiri.

4. Kuletsa Kuipitsidwa ndi Kuletsa Zopangidwa Zina

Mphete yamthunzi imathandizanso:

● Chepetsani malo osafunikira osungiramo zinthu

● Kuwongolera kufalikira kwa ma polima ndi zinthu zina

Izi zimachepetsa chiopsezo cha tinthu tating'onoting'ono ndipo zimathandiza kuti chipinda chizigwira ntchito bwino.