Mphete Imodzi ya Ceramic 0200-04877

Mu njira zapamwamba zoyeretsera plasma za semiconductor, kukhazikika kwa zinthu, kulondola kwa miyeso, ndi kuyanjana kwa plasma kwa zigawo zamkati mwa chipinda zimatsimikiza mwachindunji kukhazikika kwa zenera la njira, magwiridwe antchito, ndi ndalama zogwirira ntchito za zida. AMAT 0200-04877 Single Ring Ceramic ndi imodzi mwa zigawo zofunika kwambiri za ceramic zomwe zimagwiritsidwa ntchito mu nsanja za Applied Materials (AMAT) etch. Chopangidwa makamaka kuchokera ku ceramic ya alumina (Al₂O₃) yoyera, imagwiritsidwa ntchito kwambiri mumakina owongolera njira zamagawo a m'mphepete mwa wafer ndi machitidwe oteteza chipinda chifukwa cha kukana kwake bwino ku dzimbiri la plasma, mphamvu zamagetsi zotetezera, komanso kukhazikika kwa kutentha.

Ponena za mawonekedwe a kapangidwe kake, 0200-04877 ili ndi kapangidwe kake ka Single Ring Ceramic, ndipo thupi lake lalikulu limapangidwa ndi mphete ya alumina ceramic yoyera kwambiri. Chipangizo cha Al₂O₃ chili ndi zinthu zochepa zodetsedwa ndi zitsulo, mphamvu zambiri za dielectric, mphamvu zabwino kwambiri zamakaniko, komanso kutentha kwabwino, zomwe zimasonyeza kukana dzimbiri m'malo okhala ndi fluorine, chlorine, komanso mpweya. Poyerekeza ndi ma ceramics wamba, alumina yoyera kwambiri imachepetsa chiopsezo cha kutulutsidwa kwa tinthu tating'onoting'ono ndikuchepetsa kuipitsidwa kwa njira pamene ikusunga kukhazikika kwa nthawi yayitali, potero ikukwaniritsa zofunikira za njira zapamwamba za zigawo zofunika kwambiri m'chipinda.

Mu mapulatifomu odulira a AMAT, Single Ring Ceramic nthawi zambiri imayikidwa m'dera la Electrostatic Chuck (ESC), lomwe lili pakati pa m'mphepete mwa wafer ndi khoma lamkati la chipindacho, lomwe limagwira ntchito yofunika kwambiri mkati mwa chipinda chodulira. Ntchito yake yayikulu sikuti ndi kungochirikiza kapangidwe kake kokha, koma kutenga nawo mbali pakukonza ndikuwongolera kufalikira kwa gawo lonse la plasma. Pakudulira kwa plasma kochulukira, dera la m'mphepete mwa wafer nthawi zambiri limakhala ndi mavuto monga kuwonjezeka kwa ma ion bombardment, kusuntha kwa liwiro la m'mphepete, komanso kuwonongeka kwa kufanana kwa mawonekedwe. Kudzera mu geometry yake yokonzedwa bwino komanso mawonekedwe a dielectric, Single Ring Ceramic imasintha gawo lamagetsi la m'mphepete, kutsogolera plasma kuti ipange kugawa kwamphamvu kofanana kwambiri pamwamba pa wafer. Izi zimawongolera mawonekedwe a m'mphepete mwa wafer ndikuwonjezera magwiridwe antchito a Across-Wafer Uniformity (AWU). Kuphatikiza apo, mphete iyi ya ceramic imateteza m'mphepete mwa ESC, ma electrode assemblies, ndi kapangidwe kachitsulo ka pansi poletsa ma ion amphamvu kwambiri ndi ma radicals osinthika kuti asakhudze mwachindunji zigawo zofunika, potero imakulitsa nthawi yosamalira zida ndikuchepetsa ndalama zonse za umwini.

Monga chinthu chofunikira kwambiri chomwe chimagwiritsidwa ntchito nthawi yayitali m'malo okhala ndi mphamvu zambiri m'magazi, Single Ring Ceramic imakumana ndi kukalamba kwa zinthu komanso kuwonongeka kwa magwiridwe antchito akagwiritsidwa ntchito. Kutengera ndi zomwe zachitika kuchokera ku makampani otsogola padziko lonse lapansi opanga ma wafer fabs ndi makampani a IDM, njira zodziwika bwino zolephera zimaphatikizapo kutayika kwa magawo chifukwa cha kukokoloka kwa plasma, kuwonongeka kosazolowereka m'malo okhala ndi ma chamfer, kufalikira kwa ma microcracks pamwamba, kuwonjezeka kwa tinthu tating'onoting'ono, komanso kusungunuka kwa malo. Pamene pamwamba pa mphete ya ceramic pakuchitika kuphulika kosalekeza kwa ma ion, kapangidwe kake ka zinthuzo kamasintha pang'onopang'ono, zomwe zimapangitsa kuti pamwamba pakhale kukhwima komanso chiopsezo chachikulu cha kupanga tinthu tating'onoting'ono. Pakachitika kusintha kwa kutentha kwambiri komanso kusintha kwa njira, kupsinjika kwa kutentha komwe kwasonkhanitsidwa kungayambitsenso kupangika kwa microcrack, zomwe zimapangitsa kuti kukhazikika kwa njira kukhale kovuta. Pamene miyeso yofunika kwambiri ya mphete ya ceramic ipitilira zomwe zidazilamulira, nthawi zambiri izi zimapangitsa kuti pakhale kuchepa kwa etch etch, critical dimension (CD) drift, kuchuluka kwa tinthu tating'onoting'ono, komanso kutayika kwa zokolola.

Monga nsanja yaukadaulo yodziwika bwino pazigawo za semiconductor ndi mayankho apamwamba azinthu, Semixlab yadzipereka kupereka zinthu zapamwamba kwambiri zogwiritsidwa ntchito ndi zida zosinthira kwa makasitomala apadziko lonse lapansi popanga ma wafer, kukonza zida, ndi unyolo woperekera zinthu. Pogwiritsa ntchito kafukufuku wa nthawi yayitali komanso chidziwitso chothandiza ndi nsanja zazikulu za zida monga AMAT, LAM Research, TEL, Kokusai, ndi Hitachi High-Tech, Semixlab sikuti imangopereka mayankho azinthu za ceramic oyera kwambiri omwe amakwaniritsa miyezo ya OEM komanso imapereka kusanthula zinthu, kutsimikizira kukula, kusanthula kulephera, ndi ntchito zowunikira zosinthira m'nyumba zomwe zimagwirizana ndi zosowa za makasitomala. Pazigawo zofunika kwambiri monga 0200-04877 Single Ring Ceramic, Semixlab yakhazikitsa njira yowongolera bwino kwambiri yokhudza kuwongolera kuyera kwa zinthu zopangira, kukonza molondola, kuyang'anira kwakukulu, ndi kasamalidwe kabwino ka pamwamba, kuonetsetsa kuti zinthu zikuyenda bwino m'malo ovuta a plasma.

Pogwiritsa ntchito luso lambiri la makampani, kuthekera koyankha mwachangu, komanso zinthu zogulira zinthu padziko lonse lapansi, Semixlab nthawi zonse imathandiza makasitomala kufupikitsa nthawi yogula zinthu, kuchepetsa ndalama zokonzera, komanso kukonza nthawi yogwira ntchito ya zida. Kwa makasitomala omwe akufuna njira zina za OEM, kasamalidwe ka zida zosinthira, kapena kukonza njira zopangira zinthu, Semixlab si kampani yongopereka zida zokha koma ndi mnzawo wodalirika wosamalira zida za semiconductor komanso kuthandizira njira zogwirira ntchito.