Mphete Zotsekera za Graphite Zoyera Kwambiri

Mphete Zotsekera za Graphite Zoyera Kwambiri Zoyera Kwambiri zochokera ku Semixlab zimapangidwa kuchokera ku graphite yoyera kwambiri yoyera kwambiri, mphete zotsekera izi zimapereka magwiridwe antchito okhazikika komanso osadetsedwa omwe amathandizira mwachindunji kudalirika kwa njira, kusinthasintha kwa magwiridwe antchito, komanso nthawi yogwira ntchito ya zida pakupanga ma wafer apamwamba kwambiri.

Mu machitidwe a epitaxy, komwe kuwongolera bwino kayendedwe ka mpweya, kukhazikika kwa kuthamanga kwa mpweya, ndi kufanana kwa kutentha ndikofunikira, Semixlab's High-Purity Isostatic Graphite Sealing Rings imagwira ntchito yofunika kwambiri pakusunga umphumphu wa reactor pa kutentha kokhazikika komwe nthawi zambiri kumapitirira 1000 °C. Zoyikidwa pamalo olumikizirana a chipinda, malire otsekera, ndi malo olumikizirana ozungulira kapena osakhazikika mkati mwa malo otentha, mphete zotsekera izi zimawonetsa kukulitsa kutentha kochepa komanso kwa isotropic, zomwe zimawalola kusunga kukhazikika kwa magawo panthawi yobwerezabwereza kutentha. Kuchuluka kwawo kodetsa kwambiri kwachitsulo kumachepetsa chiopsezo cha kulowetsedwa kwa dopant mwangozi kapena kuipitsidwa ndi chitsulo, kuthandiza kuonetsetsa kuti makulidwe ofanana a epitaxial layer, ma profiles olamulidwa a doping, komanso kukula kwapamwamba kwa crystalline mu njira zonse za silicon ndi compound semiconductor epitaxy.

Mu ntchito za CVD, LPCVD, ndi PECVD, zigawo zotsekera zimakumana ndi kuphatikiza kwa kutentha kwambiri, vacuum, mpweya woyambira wowononga, komanso nthawi zina m'malo okhala ndi plasma. Ma Semixlab's High-Purity Isostatic Graphite Sealing Rings amagwiritsidwa ntchito kwambiri m'ma seal a zitseko za chipinda, nyumba zolekanitsa mpweya, ndi malo osinthira pakati pa madera otentha ndi ozizira a reactor. Kukana kwa mankhwala kwa graphite yoyera kwambiri kumathandiza kuti ntchito ikhale yokhazikika pamaso pa mpweya woopsa monga HCl, NH₃, ndi zinthu zoyambira za halogen, pomwe kapangidwe kake kolimba, ka isotropic kamachepetsa kupanga tinthu tating'onoting'ono ndi kuwonongeka kwa makina pa nthawi yayitali ya ntchito. Poyerekeza ndi njira zotsekera zachitsulo, mphete zotsekera za graphite zimapereka kukana kwakukulu ku dzimbiri ndi kutopa kwa kutentha, zomwe zimathandiza kuti nthawi yayitali yokonza ikhale yolimba komanso kubwerezabwereza bwino kwa njira zopangira zinthu zambiri.

Kufalikira kwa kutentha kwambiri, okosijeni, ndi kutentha mwachangu kumapangitsa kuti pakhale kufunikira kwakukulu pakugwira ntchito yotseka chifukwa cha kutentha kwambiri, kuchuluka kwa kutentha mwachangu, komanso kuzungulira kwa ntchito pafupipafupi. M'malo awa, mphete za Semixlab's High-Purity Isostatic Graphite Sealing Rings zimasunga umphumphu wokhazikika wotseka kutentha kopitilira 1100 °C, kuthandizira kuwongolera kokhazikika kwa mlengalenga mkati mwa machubu a uvuni ndi zipinda za RTP. Makhalidwe ofanana amakina omwe amaperekedwa ndi kukanikiza kwa isostatic amathandizira kupewa kupsinjika kwapafupi, kusweka pang'ono, ndi kusokonekera kwa chisindikizo panthawi yotenthetsera ndi kuzizira mwachangu, motero zimathandizira kukhazikika kwa ma profayilo otulutsa dopant, kukula kwa oxide kofanana, ndi zotsatira zobwerezabwereza za kutentha zomwe ndizofunikira kwambiri pakupanga zida zamakono komanso zokumbukira.

Mu ndondomeko ya Etch, kuphatikizapo ntchito zouma zomangira zomwe zimagwiritsa ntchito mankhwala a halogen ndi malo othandizidwa ndi plasma, mphete zomangira zimafunika kuti zisunge umphumphu wa vacuum pomwe zikuchepetsa kupanga tinthu tating'onoting'ono ndi kuwonongeka kwa mankhwala. Mphete Zomangira za Semixlab za High-Purity Isostatic Graphite nthawi zambiri zimagwiritsidwa ntchito m'malo osadziwika mwachindunji a plasma, monga malo olumikizirana a chipinda ndi madera olekanitsidwa ndi kapangidwe kake. Zikaphatikizidwa ndi kukhuthala koyenera kwa pamwamba kapena zophimba zoteteza, mphete zomangira izi zimapereka kukana kodalirika ku mpweya wowononga wa etch ndi kupsinjika kwa kutentha, kuthandizira mikhalidwe yokhazikika ya chipinda ndikuchepetsa chiopsezo cha kutayika kwa zokolola zokhudzana ndi kuipitsidwa.

Popangidwa ndi cholinga choyang'ana kwambiri kuyera kwa zinthu, kukhazikika kwa kapangidwe kake, komanso kudalirika kwa nthawi yayitali, Semixlab's High-Purity Isostatic Graphite Sealing Ring imagwirizana ndi ukadaulo wapamwamba wokutira komanso kuphatikiza mu zomangamanga zovuta za zida za semiconductor zimapangitsa kuti zikhale njira yodalirika yogwiritsira ntchito mfundo zotsogola komanso zokhwima. Popereka magwiridwe antchito okhazikika pansi pa mikhalidwe yovuta kwambiri ya njira, Semixlab imathandizira opanga ma semiconductor kuti akwaniritse zokolola zambiri, kugwiritsa ntchito bwino zida, komanso kuchepetsa mtengo wonse wa umwini. Tikuyembekezera mwachidwi kukhala mnzanu wa nthawi yayitali ku China.