Graphite yoyera kwambiri yokhala ndi porous

Graphite yoyera kwambiri ndi chinthu chofunikira kwambiri popanga zinthu zapamwamba za semiconductor, komwe kukhazikika kwake kwa kutentha, kuchuluka kwa kuipitsidwa kochepa kwambiri, komanso kusasinthasintha kwa njira ndizofunikira kwambiri. Mayankho a Semixlab a High Fibre Graphite amapangidwa makamaka kuti agwiritsidwe ntchito pa njira za semiconductor zomwe zimakhudzidwa ndi kutentha kwambiri komanso kuipitsidwa.

Mu njira za epitaxy, graphite yokhala ndi ma porous graphite ambiri imagwiritsidwa ntchito kwambiri m'zigawo zofunika monga zogwirira ntchito, zonyamula ma wafer, kapangidwe ka gasi, ndi zinthu zotentha. Pakukula kwa epitaxial ya Si, SiC, ndi GaN, kufanana kwa kutentha ndi kayendedwe ka mpweya kokhazikika ndizofunikira kwambiri pakulamulira makulidwe a filimu, kufanana kwa doping, ndi kuletsa zolakwika. Kapangidwe ka ma porous a Semixlab graphite kamathandizira kugawa kutentha kofanana komanso kufalikira kwa mpweya wolamulidwa kudutsa pamwamba pa wafer, potero amachepetsa kusakhazikika kwa malire ndi zotsatira zake.

Pa nthawi ya kufalikira ndi kusungunuka kwa madzi komwe kumafuna kugwira ntchito nthawi yayitali kuposa 1000 °C, graphite yokhala ndi mapovu ambiri imakhala ngati chinthu chodalirika chomangira komanso chothandizira maboti a wafer, ma liners, ndi zigawo zotetezera kutentha. Poyerekeza ndi graphite yokhuthala, kapangidwe kake ka mapovu kamachepetsa kupsinjika kwa kutentha ndi kusintha kwa kutentha panthawi yobwerezabwereza kutentha, kukulitsa kukhazikika kwa mawonekedwe ndikuwonjezera moyo wa gawo. Kusakhazikika kwa mankhwala komwe kumachitika komanso kuchuluka kwake kochepa kwa zinthu kumathandiza kusunga malo oyera, kuthandizira kuwongolera kwambiri ma profiles a kufalikira kwa dopant ndi mtundu wa filimu ya oxide pomwe kumachepetsa zoopsa zopangira tinthu tating'onoting'ono ndi kuipitsidwa kwa madzi.

Pa njira za CVD, LPCVD, ndi PECVD, graphite yokhala ndi ma porous granule yoyera kwambiri imagwira ntchito yofunika kwambiri mu ma heater, ma wafer carriers, ndi zigawo zamkati mwa chipinda zomwe zimakhudzidwa ndi mpweya woipa komanso kutentha kwambiri. Kutentha kwabwino kwa chipangizochi kumatsimikizira kusamutsa kutentha mwachangu komanso kofanana, pomwe kapangidwe kake ka ma porous kamalola kuti zinthu zomwe zayikidwa zitsekeredwe, kuchepetsa kusweka ndi kutulutsidwa kwa tinthu panthawi yogwira ntchito kwa nthawi yayitali. Izi zimathandiza mwachindunji kuti zinthu zikhazikike bwino, kukonza nthawi yayitali, komanso nthawi yowonjezera yogwira ntchito kwa zida.

Graphite ya Semixlab yoyera kwambiri imapangidwa motsatira njira yowongolera bwino kwambiri, yokhala ndi kayendetsedwe kabwino kwambiri ka zinthu zopangira, kuyeretsa, ndi uinjiniya wa microstructure. Ngati nthawi yayitali yogwira ntchito kapena kugwira ntchito m'malo ovuta kwambiri a mankhwala ikufunika, mankhwalawa amagwirizana ndi zokutira zoteteza zapamwamba monga SiC kapena TaC. Pogwiritsa ntchito kusinthasintha kwapadera kwa kapangidwe, makina, komanso ukadaulo wapamwamba wa zokutira za semiconductor, mayankho athu amatha kusinthidwa moyenera kuti agwirizane ndi zofunikira za nsanja yanu ya zida za semiconductor ndi node yogwirira ntchito. Tikuyembekezera mwachidwi kukhala mnzanu wanu wanthawi yayitali ku China.