EN 
EN
DA
NL
FI
FR
DE
IT
JA
KO
NO
PL
PT
RO
RU
ES
SV
TL
ID
SK
UK
VI
TH
TR
FA
BE
LA
UZ
SiC yokutidwa graphite chowotcha kwa MOCVD
Semixlab SiC Coated Graphite MOCVD Heater ndi chonyamulira chotenthetsera chokwera kwambiri chomwe chimapangidwira njira zopangira semiconductor zomwe zimagwiritsa ntchito chemical vapor deposition (CVD) kupanga zokutira yunifolomu, dense silicon carbide (SiC) pamwamba pa gawo lapansi la ultra-high purity graphite substrate.
Kufotokozera
Zambiri Zowonjezera
The SiC yokutidwa Graphite MOCVD Heater Chili bwino matenthedwe madutsidwe wa graphite ndi kutentha kwambiri ndi kukana dzimbiri wa zokutira SiC, ndipo chimagwiritsidwa ntchito zitsulo-organic mankhwala nthunzi deposition (MOCVD) zida kuonetsetsa bata ndi mkulu chiyero mu njira yopyapyala epitaxy kukula.
SiC Coated Graphite MOCVD Heater Product Features
1. Ultra-high chiyero ndi kukhazikika kwa mankhwala
Chiyero ≥99.99995%: Chotenthetsera chathu cha Graphite chimakonzedwa pansi pa kutentha kwambiri kwa chlorination kudzera mu njira ya CVD, yomwe imapewa bwino kuipitsidwa kwachitsulo ndikukwaniritsa kufunikira kwa malo oyera kwambiri pakupanga semiconductor.
Anti-chemical corrosion: Kulimba komanso kulimba kwambiri kwa zokutira za SiC (Vickers kuuma kwa 2500-2800) kumatha kukana kukokoloka kwa zidulo, ma alkali, mchere ndi zosungunulira za organic, zomwe zimatalikitsa moyo wautumiki wa zida zomwe zili m'malo owononga mpweya.
2. Zabwino kwambiri kutentha kutentha
Kukhazikika kwa kutentha kwapamwamba: kumatha kupirira mpaka 3000 ° C mumlengalenga, kugwira ntchito mokhazikika mpaka 2200 ° C m'malo opanda mpweya, ndi 1600-1700 ° C m'malo oxidizing, omwe ndi oyenera kwambiri pachipinda cha MOCVD reaction.
Kuchepa Kokwanira kwa Kukula kwa Matenthedwe (4.5 x 10-⁶K-¹): Mbali imeneyi ya MOCVD Graphite Heater imachepetsa kung'ambika kapena kusenda chifukwa cha kusintha kwa kutentha, kuwonetsetsa kuti kamangidwe kabwino kamayenda pakatentha nthawi yayitali.
3. Kukhathamiritsa kasamalidwe ka matenthedwe
High Thermal Conductivity (200-300 W/mK): The mkulu matenthedwe madutsidwe wa Graphite MOCVD Heater amaona kuti mankhwala akhoza mofulumira ndi uniformly kusamutsa kutentha kukwaniritsa kusasinthasintha yopyapyala pamwamba kutentha kugawa (± 1 ° C), potero bwino kuwongolera epitaxial wosanjikiza chifanane.
Laminar Gas Flow Field Design: Pambuyo pa ukadaulo wopitilira muyeso ndikukweza, kusalala kwathu kwa MOCVD Heater (Ra ≤ 0.8μm) ndi kukhathamiritsa kwa geometry kumatsimikizira kugawa yunifolomu kwa mpweya wotakasuka ndikuchepetsa kuyika kosagwirizana komwe kumachitika chifukwa cha chipwirikiti.
zofunika
Magawo Aukadaulo Kuyerekeza ndi Ubwino
| makhalidwe | Semixlab SiC yokutidwa ndi ma heaters | Ochiritsira ma graphite heaters |
| Kutentha kwakukulu kwa ntchito (inert) | 3000 ° C | 2500 ° C |
| Chemical Purity | ≥99.99995% | ≤99.99 |
| Kutentha kwa kutentha | 300W/mK | 120-150 W/mK |
| Kuphimba kumatira | 415 MPa (4-point kupinda) | 100-200Mpa |
| Moyo weniweni (zozungulira) | > Zozungulira 500 | Zozungulira 100-200 |
Mpikisano Wopikisana
Chifukwa chiyani Semixlab?
Kusintha Mwamakonda: Semixlab yadzipereka kupereka zinthu zosinthidwa makonda ndi ntchito zaukadaulo kwa makasitomala athu. Timathandizira kusintha makonda osayembekezeka (mpaka 360mm m'mimba mwake) ndi makulidwe a zokutira (20-500μm) kuti zigwirizane ndi zosowa zosiyanasiyana za zida.
Chitsimikizo Chapadziko Lonse: SiC Coated Graphite Heater yathu imagwirizana ndi SEMI, ISO 9001, ndipo zogulitsa zathu zimatumizidwa ku Europe ndi United States, komanso Japan ndi South Korea, ndi phindu lalikulu lamtengo / magwiridwe antchito.
Kugwirizana kwaukadaulo: Semixlab yakhala ikugwirizana kwambiri ndi mabungwe apamwamba ofufuza ku China, pogwiritsa ntchito matekinoloje okutirira ovomerezeka (monga CGT Carbon's SiC³ process) kukhathamiritsa kachulukidwe zokutira komanso kukana kugwedezeka kwamafuta.
